Advanced Energy to Introduce Three New Process Power Products During SEMICON West 2020
July 20 2020 - 8:00AM
Business Wire
AE announces a revolutionary plasma process power system and
expands the capabilities of its leading solid-state match and
integrated RF generator and match solution
Advanced Energy (Nasdaq: AEIS) – a global leader in highly
engineered, precision power conversion, measurement and control
solutions – today announced it will unveil three new solutions for
advanced technology node semiconductor wafer processing during the
SEMICON® West 2020 virtual conference taking place July 20 to
23.
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Advanced Energy's eVoS™ LE platform
(Photo: Business Wire)
“Semiconductor manufacturing is growing and rapidly transforming
with the rise of the 4th Industrial Revolution. AE is at the
forefront with power solutions that enable smaller features, faster
processes, tighter control and lower cost of ownership, which our
customers rely on to make the chips that fuel the data economy,”
said Peter Gillespie, vice president and general manager,
semiconductor, Advanced Energy. “Formerly almost hidden from view,
process power is now increasingly recognized as a critical enabler
in wafer processing. We look forward to sharing our products that
‘power the process’ as well as exhibiting, for the first time,
products that ‘power the platform’ with AE’s Artesyn Embedded Power
portfolio of offerings.”
AE will introduce valuable new system solutions that change how
plasma processes are powered:
eVoS™ LE: AE introduces its eVoS platform, a
wholly new non-sinusoidal plasma power technology that enables
tightly targeted ion energy control, which is increasingly
important for advanced etch and deposition processes used to create
leading-edge device features at 5nm and below. Providing an
alternative to conventional sinusoidal RF bias plasma power that
uses complex multi-frequency systems, eVoS is designed to produce
customized narrow ion energy distributions in a singular solution.
AE’s solution enables more direct control of ion energy
distributions, better bias power efficiency and less power loss
than conventional solutions, all benefits necessary to create
increasingly challenging 3D IC features. eVoS LE (Low Energy)
offers precise power control for critical plasma-based
applications, such as atomic layer etch (ALE), etch, clean,
deposition and atomic layer deposition (ALD).
Navigator® II FCi: Building on the success
of its industry-leading Navigator II impedance matching network
platform, AE introduces Navigator II FCi, a new, faster solid-state
matching network that improves value, speed and tune range compared
to standard matching network products. Based on high speed
PIN-diode technology, Navigator II FCi complements AE’s
first-to-market Navigator II FastCap™ solid-state match, broadening
the power and impedance range and improving response times to
sub-milliseconds. With no moving parts, the Navigator II FCi’s
reliability and reproducibility exceed that of traditional vacuum
capacitor matches. The Navigator II FCi is available to enable
advanced ALE applications with capabilities extended to support an
ever-broadening range of applications to meet new market
requirements. The Navigator II FCi high-speed PIN-diode technology
is also now available in the novel integrated match and generator
RF power delivery system, Paramount HFi.
Paramount® HFi: The benefits of a high
performance, low cost integrated RF power system come in Paramount
HFi’s small footprint, meeting the stringent requirements of
today’s most advanced deposition tools. AE developed the industry’s
first commercially viable, fully integrated generator and match
delivery system in 2000 with its Apex product. Apex remains a
deposition RF power workhorse, capable of switching between four
discrete tune range positions. The new Paramount HFi substantially
extends this concept with 32 tune range positions, an upgraded
fully digital control system and a new VI (RF metrology) sensor.
With these new capabilities and its widened operating window, the
Paramount HFi provides advanced process control, high
repeatability, a common exciter mode to synchronize multiple
systems in cluster configurations and advanced communication
protocol (EtherCAT). The Paramount HFi’s compact size, millisecond
response times and high reliability make it ideal for today’s short
duration deposition process steps, and where speed and reliability
are increasingly viewed as critical enablers in processing advanced
NAND and other high repetition stack devices.
AE product experts will host product previews and meetings with
exhibition attendees via AE’s virtual booth during SEMICON West
2020. Now in its 50th year, SEMICON West is a premier industry
event spanning four days of presentations, with more than 80+ hours
of technical and business programming and more than 500 exhibitors
providing the insights, innovations and intelligence enterprises
need to embrace today’s disruptive landscape. From materials,
equipment, design, manufacturing, system integration and demand
channels to new verticals and adjacencies, attendees gain access to
the best in the business and get a glimpse of a new future on the
horizon.
For detailed technical specifications, visit
www.advancedenergy.com.
About Advanced Energy
Advanced Energy (Nasdaq: AEIS) is a global leader in the design
and manufacturing of highly engineered, precision power conversion,
measurement and control solutions for mission-critical applications
and processes. AE’s power solutions enable customer innovation in
complex applications for a wide range of industries including
semiconductor equipment, industrial, manufacturing,
telecommunications, data center computing and healthcare. With
engineering know-how and responsive service and support around the
globe, the company builds collaborative partnerships to meet
technology advances, propel growth for its customers and innovate
the future of power. Advanced Energy has devoted more than three
decades to perfecting power for its global customers and is
headquartered in Denver, Colorado, USA. For more information, visit
www.advancedenergy.com.
Advanced Energy | Precision. Power. Performance.
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version on businesswire.com: https://www.businesswire.com/news/home/20200720005197/en/
For press inquiries, contact: Lora Wilson Global Results
Communications for Advanced Energy Industries, Inc.
aei@globalresultspr.com +1 949.306.0276
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