BEVERLY, Mass., Sept. 16, 2020 /PRNewswire/ -- Axcelis
Technologies, Inc. (Nasdaq: ACLS), a leading supplier of
innovative, high-productivity solutions for the semiconductor
industry, announced today that it has shipped multiple evaluation
systems for the next generation Purion H to advanced logic and
advanced 3D NAND memory device manufacturers in Asia Pacific. The systems shipped in the third
quarter.
President and CEO Mary Puma
commented, "We're very excited to ship our high current system to a
leading advanced logic device manufacturer. We are also pleased
with the high current penetration at a new 3D NAND customer.
Placing these new products in major markets is key to our growth in
high current, the largest ion implant segment, and will enable our
long term $650M business model."
Executive Vice President of Product Development, Bill Bintz, commented, "The Purion H platform's
evolutionary design has been optimized to solve customer's high
value, high impact technical challenges in advanced logic and
advanced memory device manufacturing. The Purion H features
Axcelis' advanced spot beam technology delivering best in class
dose and angle control for the tightest process control in the most
challenging applications. We're excited about the potential of
our full high current Purion product line in these market
segments."
About Axcelis:
Axcelis (Nasdaq: ACLS), headquartered
in Beverly, Mass., has been
providing innovative, high-productivity solutions for the
semiconductor industry for over 40 years. Axcelis is dedicated to
developing enabling process applications through the design,
manufacture and complete life cycle support of ion implantation
systems, one of the most critical and enabling steps in the IC
manufacturing process. Learn more about Axcelis at
www.axcelis.com.
CONTACTS:
Maureen Hart
(editorial/media) 978.787.4266
Doug Lawson (investor relations)
978.787.9552
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SOURCE Axcelis Technologies, Inc.