Advanced Energy Introduces the Ovation(TM) Very-High Frequency Power Delivery System for Emerging Semiconductor Etch Application
June 29 2004 - 8:00AM
PR Newswire (US)
Advanced Energy Introduces the Ovation(TM) Very-High Frequency
Power Delivery System for Emerging Semiconductor Etch Applications
Unique Power-Matching Technique Enables Faster Processing and
Higher Film Quality Than Was Previously Possible FORT COLLINS,
Colo., June 29 /PRNewswire-FirstCall/ -- Advanced Energy
Industries, Inc. (NASDAQ:AEIS) today introduced the breakthrough
Ovation(TM) very-high frequency (VHF) power delivery system. The
newest addition to AE's industry-leading power portfolio, this
fully integrated power-delivery system enables faster,
higher-precision processes, such as those required for sub-90 and
sub-65 nm etch applications, through implementation of a unique
power delivery scheme. The Ovation power system was specifically
designed to expand the tight process windows constraining advanced
etch processes by providing a new standard for power density, wide
operating range and unmatched transient response. (Logo:
http://www.newscom.com/cgi-bin/prnh/20030825/AEISLOGO) Today's
demanding, narrow-linewidth dielectric etch processes increasingly
require rapid transitioning between process steps with a power
solution that ensures consistent and repeatable performance. The
Ovation VHF power-delivery system is the first to accurately
deliver power into a non-50-ohm environment without an external
sensor, allowing the Ovation solution to react faster than
traditional power supplies. Embedded measurement technology enables
previously unavailable insight into chamber plasma parameters and
performance. Further, 60-MHz technology reduces voltage potential
across the plasma sheath, minimizing ion etch damage, and thus
improving film quality and yields. Advanced Energy CEO Doug Schatz
commented, "The Ovation VHF power-delivery system extends AE's lead
in the power arena, with unprecedented performance for an
integrated power source. With power becoming an increasingly
critical enabler of process performance, next-generation power
systems must be able to meet both the process and production
requirements of today's most advanced fabs." Senior Vice President
and GM of AE's core products group Steve Rhoades noted, "To date,
no other supplier has been able to deliver a very-high- frequency
power system with this range of features for exacting etch
performance at the sub-90 nm nodes. This is yet another example of
AE's continuing ability to deliver competitive advantage to our
customers." Ovation(TM) Very-High Frequency Power Delivery System
Technology and Capabilities Developed to meet the demanding
requirements of advanced etch processes, the Ovation VHF power
system efficiently delivers optimal power-up to 2.7 kW at a fixed
60 MHz. The system's unique power-delivery scheme offers the
highest power efficiency and power density commercially available
-- in a compact, half-rack unit, nearly half the size of competing
systems. The Ovation power system also features embedded voltage
and current measurement technology for real-time data mining. This
feature enables previously unavailable insight into chamber plasma
parameters. About Advanced Energy Advanced Energy is a global
leader in the development and support of technologies critical to
high-technology manufacturing processes used in the production of
semiconductors, flat panel displays, data storage products, compact
discs, digital video discs, architectural glass and other advanced
product applications. Leveraging a diverse product portfolio and
technology leadership, AE creates solutions that maximize process
impact, improve productivity and lower cost of ownership for its
customers. This portfolio includes a comprehensive line of
technology solutions in power, flow management, thermal
instrumentation and plasma and ion beam sources for original
equipment manufacturers (OEMs) and end-users around the world. AE
operates in regional centers in North America, Asia and Europe and
offers global sales and support through direct offices,
representatives and distributors. Founded in 1981, AE is a publicly
held company traded on Nasdaq National Market under the symbol
AEIS. More information can be found at
http://www.advanced-energy.com/. Advanced Energy, AE, and Ovation
are trademarks of Advanced Energy Industries. AP Archive:
http://photoarchive.ap.org PRN Photo Desk, photodesk@prnewswire.com
http://www.newscom.com/cgi-bin/prnh/20030825/AEISLOGODATASOURCE:
Advanced Energy Industries, Inc. CONTACT: Marna Shillman, Corporate
Communication Manager of Advanced Energy Industries, Inc.,
+1-970-407-6280, ; or Angie Kellen, Account Manager of MCA,
+1-650-968-8900, , for Advanced Energy Industries, Inc. Web site:
http://www.advanced-energy.com/
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