Advanced Energy Unveils Litmas(TM) RPS 1501 Remote Plasma Source for Pre-Clean, Photoresist Strip and ALD Applications
June 22 2004 - 8:00AM
PR Newswire (US)
Advanced Energy Unveils Litmas(TM) RPS 1501 Remote Plasma Source
for Pre-Clean, Photoresist Strip and ALD Applications Fully
Integrated System Enables Faster Changing Processes, Offers Wider
Operating Range and Maximizes Process Development Flexibility FORT
COLLINS, Colo., June 22 /PRNewswire-FirstCall/ -- Advanced Energy
Industries, Inc. (NASDAQ:AEIS) today unveiled its next-generation
Litmas(TM) RPS 1501 linear-inductive remote plasma source for
advanced thin-film processes. Especially well-suited for wafer
pre-clean, photoresist strip, gate dielectric deposition and atomic
layer deposition (ALD) applications, the Litmas RPS 1501 also
facilitates the development of a wide variety of other advanced
process applications. Specifically, its plug-and-play installation,
uniquely wide matching range and small footprint reduce
time-to-market for new chamber development. (Logo:
http://www.newscom.com/cgi-bin/prnh/20030825/AEISLOGO ) AE's Litmas
RPS 1501 is the only fully integrated, remote, inductive plasma
source and power delivery system available in a high-conductance,
low-surface-area, linear geometry. The platform's solid-state
power-matching design delivers up to 1.5 kW of stable
radio-frequency (RF) power in less than 3 milliseconds, enabling
faster changing processes, reducing process variability and
improving yields for advanced sub-90 nm and 300 mm applications.
Moreover, its extremely low source-to-source variability enhances
end-user process development and yields. According to Advanced
Energy Chairman and CEO Douglas Schatz, "The new Litmas RPS 1501 is
a high-performance addition to AE's portfolio of remote plasma
sources. Along with our Xstream(TM) RPS with Active Matching
Network(TM), the Litmas RPS broadens our ability to help customers
enable their advanced processes and improve yields." Steve Rhoades,
senior vice president and general manager of AE's core product
groups, noted, "The Litmas RPS is a great example of AE's
continuing commitment to increasing our customers' competitive
advantage. The Litmas RPS does this by directly enabling new,
sub-90 nm process development as well as existing process
improvements." Litmas(TM) RPS 1501 Technology and Capabilities
Using the patented LitmasMatch(TM) topology to couple the 2 MHz
power from the field-effect transistors (FETs) of the power
amplifier circuit, the Litmas RPS design delivers RF power in an
inherently more efficient manner than traditional RF plasma systems
that convert power through a 50-ohm cable. The feedback and control
circuit utilized in the LitmasMatch topology allows the platform to
dynamically adjust the timing of the FETs to maintain proper
operation even as plasma loads vary substantially and rapidly with
changes in pressure, power or chemistry. Further, the source
chamber, which is available in both low-recombination quartz and
durable alumina configurations, uses a patented, ringing-coil
antenna design that maximizes ignition in multiple chemistries.
About Advanced Energy Advanced Energy is a global leader in the
development and support of technologies critical to high-technology
manufacturing processes used in the production of semiconductors,
flat panel displays, data storage products, compact discs, digital
video discs, architectural glass and other advanced product
applications. Leveraging a diverse product portfolio and technology
leadership, AE creates solutions that maximize process impact,
improve productivity and lower cost of ownership for its customers.
This portfolio includes a comprehensive line of technology
solutions in power, flow management, thermal instrumentation and
plasma and ion beam sources for original equipment manufacturers
(OEMs) and end-users around the world. AE operates in regional
centers in North America, Asia and Europe and offers global sales
and support through direct offices, representatives and
distributors. Founded in 1981, AE is a publicly held company traded
on Nasdaq National Market under the symbol AEIS. More information
can be found at http://www.advanced-energy.com/ Advanced Energy,
AE, Litmas, Xstream, Active Matching Network and LitmasMatch are
trademarks of Advanced Energy Industries. AP Archive:
http://photoarchive.ap.org PRN Photo Desk, photodesk@prnewswire.com
http://www.newscom.com/cgi-bin/prnh/20030825/AEISLOGODATASOURCE:
Advanced Energy Industries, Inc. CONTACT: Marna Shillman, Corporate
Communication Manager of Advanced Energy Industries, Inc.,
+1-970-407-6280, ; or Angie Kellen, Account Manager of MCA,
+1-650-968-8900, , for Advanced Energy Industries, Inc. Web site:
http://www.advanced-energy.com/
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