Advanced Energy Unveils New Multi-Gas, Multi-Range Digital MFCs That Reduce Spares Inventories, Tool Downtime and CoO
April 08 2004 - 8:00AM
PR Newswire (US)
Advanced Energy Unveils New Multi-Gas, Multi-Range Digital MFCs
That Reduce Spares Inventories, Tool Downtime and CoO Aera(R)
Transformer(TM) MFCs Offer New Levels of Process Flexibility for
all Plasma Process Environments in Today's Advanced Fabs FORT
COLLINS, Colo., April 8 /PRNewswire-FirstCall/ -- Advanced Energy
Industries, Inc. today announced its new Aera(R)Transformer(TM)
family of digital multi-gas, multi-range mass flow controllers
(MGMR MFCs). These advanced, high-precision products provide
original equipment manufacturers (OEMs) and end users with optimal
MFC flexibility and process efficiency for their semiconductor and
industrial vacuum applications. (Logo:
http://www.newscom.com/cgi-bin/prnh/20030825/AEISLOGO) Building on
the successful, field-proven Aera(R) FC-D980 MFC technology, the
new Transformer products enable customers to dramatically reduce
their spares inventories. This reduced inventory can create a
substantially lower total cost of ownership (CoO) -- a significant
advantage for today's state-of- the-art 300 mm fabs. In designing
this next-generation MGMR family of products, AE developed an
inherently flexible platform that provides unmatched field
programmability to run any gas for any gasflow range -- from 10
sccm to up to 30 slm. As few as eight different Transformer MFC
models can be used to support a fab's requirements. These MFCs
allow unlimited gas selection without recalibration and they can be
pulled directly from a customer'sinventory shelf and easily
programmed to meet the application requirements. With its ability
to reduce the valuable time it takes to calibrate other digital
MFCs, the versatile Transformer platform reduces tool downtime and
improves fab CoO. "Chipmakers and OEMs alike are continually
seeking to streamline their processes and reduce their overall CoO
in order to offset the high costs of equipping these facilities,"
noted Chairman and CEO of Advanced Energy Douglas Schatz. "By
working closely with our customers, we developed a multi-gas,
multi-range digital MFC that helped them meet their advanced flow
management requirements. We are very pleased both with the
Transformer MFC's excellent performance results and its ability to
optimize our customers' critical plasma processes, providing
unmatched reliability and flexibility to help them achieve lower
overall cost of ownership." According to Steve Rhoades, vice
president and general manager of AE's Control Systems and
Instrumentation group, "TheAera name is well-known for world-class
MFCs. This next-generation Transformer line of multi-gas,
multi-range products continues that best-of-breed tradition." To
provide world-class, after-market support, AE maintains a
well-established global support infrastructure in all the major
semiconductor manufacturing regions, including Asia, the United
States and Europe, to provide fast turnaround on re-calibration
services. About Advanced Energy Advanced Energy is a global leader
in the development and support of technologies critical to
high-technology manufacturing processes used in the production of
semiconductors, flat panel displays, data storage products, compact
discs, digital video discs, architectural glass, and other advanced
product applications. Leveraging a diverse product portfolio and
technology leadership, AE creates solutions that maximize process
impact, improve productivity and lower cost of ownership for its
customers. This portfolio includes a comprehensive line of
technology solutions in power, flow and thermal management, plasma
and ion beam sources, and integrated process monitoring and control
for original equipment manufacturers (OEMs) and end-users around
the world. AE operates in regional centers in North America, Asia
and Europe and offers global sales and support through direct
offices, representatives and distributors. Founded in 1981, AE is a
publicly held company traded on Nasdaq National Market under the
symbol AEIS. More information can be found at
http://www.advanced-energy.com/.
http://www.newscom.com/cgi-bin/prnh/20030825/AEISLOGO
http://photoarchive.ap.org/ DATASOURCE: Advanced Energy Industries,
Inc. CONTACT: Marna Shillman, Corporate Communication Manager of
Advanced Energy Industries, Inc., +1-970-407-6280, ; or Dori Jones,
Account Director of MCA, +1-650-968-8900, , for Advanced Energy
Industries, Inc. Web site: http://www.advanced-energy.com/
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