Advanced Energy(R) Unveils New Line of Sekidenko Multi-Channel Optical Fiber Thermometers and Emissometers
June 27 2006 - 8:00AM
PR Newswire (US)
New Product Family Offers Shorter Processing Times and Increased
Productivity for Multiple Semiconductor Processes FORT COLLINS,
Colo., June 27 /PRNewswire-FirstCall/ -- Advanced Energy
Industries, Inc. (NASDAQ:AEIS) today announced its new line of
Sekidenko optical fiber thermometers (OFTs) and emissometers
comprised of the OR4000T, OR4000E and OR400T family of products.
AE(R)'s OFTs are ideally suited for tightly controlled,
temperature- and emissivity-dependent applications such as laser
annealing, RTP, MO-CVD, PE-CVD, PVD, metal etch and other
applications. The new Sekidenko product family offers original
equipment manufacturers (OEMs) the exceptional stability and
product flexibility needed to meet the increasingly stringent
demands of today's leading semiconductor applications. AE will
introduce the new OR4000 product family during SEMICON(R) West
2006, to be held July 11-13 at San Francisco's Moscone Convention
Center. (Logo:
http://www.newscom.com/cgi-bin/prnh/20030825/AEISLOGO ) AE's
advanced Sekidenko thermal instrumentation products provide OEMs
with superior, non-contact temperature and emissivity capabilities
for semiconductor processes where uniform substrate temperatures
enable critical process results and enhanced throughput and yield.
Modular in design, AE's OR4000T and OR4000E can be rapidly tailored
to meet the unique requirements of each process application. Chuck
Gooding, vice president of the Sekidenko product line, noted, "AE's
Sekidenko instrumentation delivers the high stability, exceptional
repeatability and precision required for advanced,
volume-production environments. Based on the successful OR2000
family, this new line of OFTs continues AE's best-of-breed
tradition. Our dedication to technology innovation exemplifies our
commitment to increasing our customers' competitive advantage."
OR4000T Multi-Channel OFT The OR4000T provides multi-channel
temperature measurement and enables uniform, integrated
measurements within multiple chambers. Designed for RTP, HDP-CVD,
epi, ALD and HDD applications, the OR4000T supports read rates up
to 2 KHz for the most demanding semiconductor applications. OR4000E
Real-Time Emissivity Compensated OFT The OR4000E delivers the same
high speed performance as the OR4000T with the added benefit of
real-time emissivity compensated temperature measurement and the
capability to support growth rate monitoring typically required for
MO-CVD applications. Designed for RTP, HDP-CVD, MO-CVD and UV cure,
the OR4000E provides accurate temperature and emissivity
measurements across a wide variety of processes. OR400T Precision,
Single-Channel OFT The OR400T is a precision instrument that
enables cost-effective temperature measurement in a compact form
factor. The single-channel product provides a cost competitive
alternative to thermocouples with the added benefit of non-contact,
in-situ temperature measurement and immunity from RF noise. The
OR400T is ideally suited for several high-volume semiconductor
applications including PE-CVD, LP-CVD, PVD and metal etch. To learn
more about AE's new line of OFTs and emissometers during SEMICON
West, visit the company in Booth #2202 in the South Hall at Moscone
Convention Center in San Francisco. Editors interested in meeting
with AE during the show may contact Angie Kellen by phone:
650.968.8900 x120, or email: . About Advanced Energy Advanced
Energy(R) develops innovative power and control technologies that
drive high-growth, plasma thin-film manufacturing processes
worldwide, including semiconductors, flat panel displays, data
storage products, solar cells, architectural glass and other
advanced product applications. AE(R)'s product portfolio includes
precise, flexible power systems; reliable gas and liquid
flow-management systems; accurate thermal instruments; and global
support services. Leveraging this focused product portfolio and
technology leadership, AE creates solutions aimed at maximizing
process impact, improving productivity and lowering cost of
ownership for its customers, including original equipment
manufacturers (OEMs) and end-users around the world. AE operates in
regional centers in North America, Asia and Europe and offers
global sales and support through direct offices, representatives
and distributors. Founded in 1981, AE is a publicly held company
traded on Nasdaq National Market under the symbol AEIS. For more
information, go to http://www.advanced-energy.com/ Advanced
Energy(R) and AE(R) are trademarks of Advanced Energy Industries,
Inc. SEMICON(R) is a trademark of Semiconductor Equipment and
Materials International (SEMI).
http://www.newscom.com/cgi-bin/prnh/20030825/AEISLOGO
http://photoarchive.ap.org/ DATASOURCE: Advanced Energy Industries,
Inc. CONTACT: Marna Shillman, Corporate Communication Manager of
Advanced Energy Industries, Inc., +1-970-407-6280, ; or Angie
Kellen, Account Director of MCA, +1-650-968-8900, , for Advanced
Energy Industries, Inc. Web site: http://www.advanced-energy.com/
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