Digital MFC Selected for New Semiconductor Manufacturing Platform FORT COLLINS, Colo., March 8 /PRNewswire-FirstCall/ -- Advanced Energy Industries, Inc. (NASDAQ:AEIS) today announced that its Aera(R) Transformer(TM) digital MFC has been awarded default-standard status on a new semiconductor platform by a major Japanese original equipment manufacturer (OEM). The Transformer family enables this leading OEM's equipment to run with optimal process flexibility and efficiency. This OEM's new semiconductor platform requires precise flow control for today's most advanced applications. The Transformer MFC earned default-standard status by out-performing competitive units. (Logo: http://www.newscom.com/cgi-bin/prnh/20030825/AEISLOGO ) This new platform will run today's most demanding applications, necessitating outstanding MFC response, accuracy, repeatability and exceptional reliability. During the rigorous process of qualifying for this new platform, the Transformer MFC consistently demonstrated higher mean-time-between-failure (MTBF) performance over non-Aera MFCs. The higher Transformer MTBF was proven to contribute to reduced platform downtime and improved throughput and yield. "AE's Aera flow products have a strong tradition of extraordinary performance and reliability," commented Dr. Hans Betz, president and CEO of AE. "Our Transformer MFCs have taken those advantages a step further by offering customers functionality that directly correlates to process improvements and profitable operation for both OEM and end-user customers." With the inherently flexible Transformer family, as few as eight different Transformer multi-gas, multi-range (MGMR) models can support an entire fab's MFC requirements. Pulling a Transformer MFC from inventory, customers can readily program it to meet their exacting specifications -- without the traditional time and expense required to calibrate other MFCs. In addition, running any gas and gas-flow range between 10 sccm and 30 slm, the Transformer family features advanced sensor and valve technology, field-proven components and high-speed, digital circuitry to deliver the most precise gas-flow control available. Further, once these platforms are installed, AE will continue to support this OEM and its end-user customers around the world through a well-established global support infrastructure in all the major manufacturing regions, including Asia, the United States and Europe. About Advanced Energy Advanced Energy is a global leader in the development and support of technologies critical to high-technology manufacturing processes used in the production of semiconductors, flat panel displays, data storage products, compact discs, digital video discs, architectural glass and other advanced product applications. Leveraging a diverse product portfolio and technology leadership, AE creates solutions that maximize process impact, improve productivity and lower cost of ownership for its customers. This portfolio includes a comprehensive line of technology solutions in power, flow management, thermal instrumentation and plasma and ion beam sources for original equipment manufacturers (OEMs) and end-users around the world. AE operates in regional centers in North America, Asia and Europe and offers global sales and support through direct offices, representatives and distributors. Founded in 1981, AE is a publicly held company traded on Nasdaq National Market under the symbol AEIS. More information can be found at http://www.advanced-energy.com/ Advanced Energy, AE, Aera and Transformer are trademarks of Advanced Energy Industries, Inc. http://www.newscom.com/cgi-bin/prnh/20030825/AEISLOGO http://photoarchive.ap.org/ DATASOURCE: Advanced Energy Industries, Inc. CONTACT: Marna Shillman, Corporate Communication Manager of Advanced Energy Industries, Inc., +1-970-407-6280, ; or Angie Kellen, Account Director of MCA, +1-650-968-8900, , for Advanced Energy Industries, Inc. Web site: http://www.advanced-energy.com/

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