Advanced Energy Introduces Specialized DC Power Systems Delivering Higher Yields and Increased Throughput for the Most Demanding
February 15 2005 - 7:00AM
PR Newswire (US)
Advanced Energy Introduces Specialized DC Power Systems Delivering
Higher Yields and Increased Throughput for the Most Demanding PVD
Applications Summit(TM) DC Power Conversion and Control Systems
Offer Superior Power Performance, Repeatability and Precision for
the Latest-Generation Flat Panel Displays and Reduced-Geometry
Semiconductors FORT COLLINS, Colo., Feb. 15 /PRNewswire-FirstCall/
-- Advanced Energy Industries, Inc. (NASDAQ:AEIS) today introduced
its new Summit(TM) series of DC power conversion and control
systems for the most advanced PVD applications. These specialized
power systems enable higher yields, increased throughput and a new
level of process flexibility for the most demanding Generation 7
and 8 flat panel display (FPD) and sub-65 nm semiconductor
applications. (Logo:
http://www.newscom.com/cgi-bin/prnh/20030825/AEISLOGO ) As
leading-edge manufacturers seek to push their processes to new
performance levels, they require state-of-the-science arc
management as well as exceptional power repeatability and precision
to achieve the tight plasma process control for consistently high
yields. Summit power systems deliver these advanced features along
with an extended output power range and complete target
utilization. Summit systems' ability to accommodate all regional
input voltages enables superior operating flexibility in the vast
majority of electricity supply circumstances, including brownouts.
Further, their modular design enhances process tool performance and
reliability. Executive Vice President of AE's core products and
operations group, Steve Rhoades, noted, "Customers around the world
look to Advanced Energy to help innovate their processes with
exacting power delivery that helps improve plasma process control.
The Summit DC power systems' unprecedented arc management enables
higher yields in the newest PVD applications. Their versatile
operating range has already given our customers the ability to
operate their next-generation tools in ground-breaking processes."
Summit(TM) Power Systems' Technology and Capabilities Summit DC
power systems were developed specifically to meet the demanding
process requirements of Generation 7 and 8 FPD and reduced-geometry
semiconductor applications. They efficiently deliver up to 50 kW
from 300 to 3000 VDC while interfacing with an input power range of
380 to 480 VAC. Summit systems establish a new standard in arc
management by delivering a miniscule 12 mJoules of energy into a
plasma arc at full power. Their modular design eases installation
and maintenance, increasing tool uptime and reliability. Moreover,
in critical reactive processes requiring an extreme level of arc
management, AE's new Pulsar(TM) pulsing accessory offers
exceptional process control. Using patented technology, the Pulsar
accessory enhances Summit systems' capabilities, further minimizing
damaging arc effects in processes requiring low contamination.
Pulsar capability has also demonstrated improved film density when
forming complex compounds. About Advanced Energy Advanced Energy is
a global leader in the development and support of technologies
critical to high-technology manufacturing processes used in the
production of semiconductors, flat panel displays, data storage
products, compact discs, digital video discs, architectural glass
and other advanced product applications. Leveraging a diverse
product portfolio and technology leadership, AE creates solutions
that maximize process impact, improve productivity and lower cost
of ownership for its customers. This portfolio includes a
comprehensive line of technology solutions in power, flow and
thermal management and plasma and ion beam sources for original
equipment manufacturers (OEMs) and end-users around the world. AE
operates in regional centers in North America, Asia and Europe, and
offers global sales and support through direct offices,
representatives and distributors. Founded in 1981, AE is a publicly
held company traded on Nasdaq National Market under the symbol
AEIS. More information can be found at
http://www.advanced-energy.com/ Advanced Energy, AE and Summit are
trademarks of Advanced Energy Industries, Inc.
http://www.newscom.com/cgi-bin/prnh/20030825/AEISLOGO
http://photoarchive.ap.org/ DATASOURCE: Advanced Energy Industries,
Inc. CONTACT: Marna Shillman, Corporate Communication Manager of
Advanced Energy Industries, Inc., +1-970-407-6280, Web site:
http://www.advanced-energy.com/
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