Leveraging decades of piezo nanopositioning technology
experience, introducing at 2024 Semicon West
AUNURN, Mass., July 9, 2024
/PRNewswire-PRWeb/ -- PI's newest wafer inspection solution is
based on a hybrid kinematics design, combining Piezo-Walk motors
and piezo stacks to achieve both long travel and highly dynamic,
ultra-precise motion. This integrated 4-DOF solution reduces
equipment complexity, integration efforts, costs, and risks.
Piezo-Walk motors are self-locking at rest, adding no servo
dither and heat, unlike other motion techniques. The high bandwidth
of the short-travel piezo stack actuators allows for dynamic
tracking and error compensation of external disturbances (e.g.,
from long travel XY wafer stages).
The 4DOF module can also correct for rotational wafer
misalignment and takes wafer thickness and machine static
characteristics into account.
The high-stiffness design of the Tip-Tilt drive module provides
extremely fast step and settle (better than 10msec) and position
stability (better than 0.05µrad).
More information on Piezo Stage for Wafer Inspection &
Metrology
PI's advanced design expertise and long experience as a supplier
to top tier semiconductor manufacturers and leading system
integrators enables us to understand and meet the high demands of
the industry, including copy exactly and meeting strict cleanroom
requirements.
Industries Served
Semiconductors, Metrology, Optics, Photonics
PI Americas
https://www.pi-usa.us | info@pi-usa.us | (508) 832-3456
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Media Contact
Piezo Stage for Wafer Inspection & Metrology, PI (Physik
Instrumente) LP, (508) 832-3456, press-release@pi-usa.us,
https://www.pi-usa.us/
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SOURCE PI (Physik Instrumente) LP