FSI International Receives Orders for its ANTARES® Systems from Several Leading Device Manufacturers
April 20 2012 - 9:04AM
Business Wire
FSI International, Inc. (Nasdaq: FSII) announced today that
several leading device producers, including a new fab, have placed
orders for ANTARES® CryoKinetic Cleaning Systems. Chip providers
currently use the system for various back-end-of-line (“BEOL”)
particle removal processes and front-end-of-line (“FEOL”) advanced
node applications as they continue their quest to improve yields.
The systems are expected to ship in fiscal 2012.
The ANTARES® System is a fully automated, single-wafer,
CryoKinetic system used for processing 200/300mm wafers with
capabilities to remove nanoscale particles. CryoKinetic processing
technology is an all-dry, chemical free process that removes
particles through impact by high-velocity cryogenic Ar/N2 aerosol,
and reduces defects without damaging the wafer surface, even on
copper and porous low-k films. The system’s highly efficient dry
cleaning solution can be used for a variety of particle removal
applications in FEOL and BEOL. Many of the leading logic device
manufacturers worldwide utilize the ANTARES® System for its defect
reduction and yield improvement benefits at current leading edge
technology nodes.
FSI International, Inc. is a global supplier of surface
conditioning equipment, technology and support services for
microelectronics manufacturing. Using the company’s broad portfolio
of cleaning products, which include batch and single-wafer
platforms for immersion, spray and cryogenic aerosol technologies,
customers are able to achieve their process performance flexibility
and productivity goals. The company’s support services programs
provide product and process enhancements to extend the life of
installed FSI equipment, enabling worldwide customers to realize a
higher return on their capital investment. For more information,
visit FSI’s website at http://www.fsi-intl.com.
“Safe Harbor” Statement Under the Private Securities
Litigation Reform Act of 1995This press release contains
certain “forward-looking” statements (*), including, but not
limited to expected shipment of the ANTARES® Systems in fiscal
2012. Except for the historical information contained herein, the
matters discussed in this news release are forward-looking
statements involving risks and uncertainties, both known and
unknown, that could cause actual results to differ materially from
those in such forward-looking statements. Such risks and
uncertainties include, but are not limited to, changes in industry
conditions; order delays or cancellations; general economic
conditions; changes in customer capacity requirements and demand
for microelectronics; the extent of demand for the company’s
products and its ability to meet demand; global trade policies;
worldwide economic and political stability; the company’s
successful execution of internal performance plans; the cyclical
nature of the company’s business; volatility of the market for
certain products; performance issues with key suppliers and
subcontractors; the level of new orders; the timing and success of
current and future product and process development programs; the
success of the company’s direct distribution organization; legal
proceedings; the potential impairment of long-lived assets; the
potential adverse financial impacts resulting from declines in the
fair value and liquidity of investments the company presently
holds; the impact of natural disasters on parts supply and demand
for products; the ability to attract, retain and motivate a
sufficient number of qualified employees; as well as other factors
listed herein or from time to time in the company’s SEC reports,
including our latest 10-K annual report and 10-Q quarterly reports.
The company assumes no duty to update the information in this press
release.
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