BEVERLY, Mass., June 17, 2020 /PRNewswire/ -- Axcelis
Technologies, Inc. (Nasdaq: ACLS), a leading supplier of
innovative, high-productivity solutions for the semiconductor
industry, announced today that it has shipped the third Purion
Dragon™ high current system to a leading memory manufacturer for
use in DRAM applications, and the first Purion XEmax™ high energy
system to a leading CMOS image sensor manufacturer. Both systems
are new tool evaluations and shipped in Q2.
President and CEO Mary Puma
commented, "We continue to make strides on our market segmentation
strategy, by expanding the Purion platform with product extensions
featuring enabling technology aimed at solving customers' emerging
device challenges. These new penetrations are key milestones in
achieving our $550M and $650M target business models. As demand for these
devices increases and targeted market segments expand, we see
significant opportunity for the Purion Platform to fuel
growth."
Bill Bintz, Executive Vice
President, Product Development explained, "The Purion Dragon™ is an
innovative new high current implanter architecture, featuring
scanned spot beam technology using revolutionary orthogonal beam
optics, designed for both advanced memory and logic
applications. The Purion Dragon was developed to address
chipmakers most challenging ion implantation applications by
delivering the highest levels of process control with significant
productivity gains for the high current market."
"The new Purion XEmax high energy implanter was designed for
emerging, high performance image sensor applications," Bintz
continued. "The enhanced beamline features multiple filtration
systems to eliminate energetic metal contaminants which can
otherwise result in compromised dark current and white pixel count
levels.. The new system is built on the industry leading Purion XE
high energy implant platform and features Axcelis' new patented
Boost Technology™, which delivers beam energies up to 15 MeV. With
innovative new technology, the Purion XEmax is delivering the
tightest angle and overall process control to enable higher quality
photodiode performance for next generation CIS devices."
About Axcelis:
Axcelis (Nasdaq: ACLS), headquartered in Beverly, Mass., has been providing innovative,
high-productivity solutions for the semiconductor industry for over
40 years. Axcelis is dedicated to developing enabling process
applications through the design, manufacture and complete life
cycle support of ion implantation systems, one of the most critical
and enabling steps in the IC manufacturing process. Learn more
about Axcelis at www.axcelis.com.
CONTACTS:
Maureen Hart (editorial/media)
978.787.4266
Doug Lawson (investor relations)
978.787.9552
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SOURCE Axcelis Technologies, Inc.