Advanced Energy Expands Market-Leading RF Power Generator to Meet Critical Needs of Semiconductor and Industrial Manufacturers
January 11 2021 - 8:00AM
Business Wire
The Paramount HP 10013 power generator broadens AE’s
Paramount product family, delivering higher power to speed
processes and improve yield
Advanced Energy (Nasdaq: AEIS) – a global leader in highly
engineered, precision power conversion, measurement, and control
solutions – today expands its flagship Paramount® RF (radio
frequency) power generator product family with the introduction of
the new Paramount HP 10013 power generator.
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The Paramount HP 10013 power generator
broadens Advanced Energy's flagship Paramount product family,
delivering higher power to speed processes and improve yield for
semiconductor and industrial manufacturers. (Photo: Business
Wire)
Designed for semiconductor and industrial thin film
applications, Paramount HP 10013 builds on AE’s industry-leading
power delivery systems for plasma applications, including conductor
etch, dielectric etch, deposition, sputtering and ion implantation.
The Paramount HP 10013 adds higher power 10 kW capabilities to the
Paramount 13.56 MHz platform, with the ability to deliver high
impulse energy with low average power for accurate and repeatable
pulsed power. The higher power increases plasma density and ion
energy that enable faster and deeper etching and faster deposition
processes, addressing the requirements for leading-edge high aspect
ratio devices and new emerging applications.
“With ICs now a part of nearly every product in consumer,
entertainment, manufacturing, computing, transportation and many
other markets, our industry is faced with a much wider range of
applications, as well as challenges, for precision process power,”
said Peter Gillespie, senior vice president, semiconductor and
computing products, Advanced Energy. “AE’s Paramount product family
pioneered pulsing RF with the industry’s first commercially viable,
all-digital RF power supplies. By introducing the higher power
solution, AE enables our customers’ innovation in creating more
complex, three-dimensional architectures and new materials.”
The Paramount platform’s digital architecture provides precise
power management and streamlines new function integration without
the need for hardware changes. Full digital control provides
dynamic, real-time detection of plasma changes and delivers
high-power output with repeatable performance. The digital
interface enables synchronization with other RF power generators
and provides seamless connection to AE’s market-leading line of
Navigator and Navigator II digital matching networks, together, the
most widely used plasma power delivery solution in the
semiconductor industry.
For detailed technical specifications, visit the Paramount
family product page.
About Advanced Energy
Advanced Energy (Nasdaq: AEIS) is a global leader in the design
and manufacturing of highly engineered, precision power conversion,
measurement and control solutions for mission-critical applications
and processes. AE’s power solutions enable customer innovation in
complex applications for a wide range of industries including
semiconductor equipment, industrial, manufacturing,
telecommunications, data center computing and healthcare. With
engineering know-how and responsive service and support around the
globe, the company builds collaborative partnerships to meet
technology advances, propel growth for its customers and innovate
the future of power. Advanced Energy has devoted more than three
decades to perfecting power for its global customers and is
headquartered in Denver, Colorado, USA. For more information, visit
www.advancedenergy.com.
Advanced Energy | Precision. Power. Performance.
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version on businesswire.com: https://www.businesswire.com/news/home/20210111005429/en/
For press inquiries, contact: Lora Wilson Global Results
Communications for Advanced Energy Industries, Inc.
aei@globalresultspr.com +1 949.306.0276
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