Advanced Energy's Xstream(TM) Remote Plasma Source With Active Matching Network(TM) Named One of Micro Magazine's 'Greatest Hits
March 09 2004 - 7:00AM
PR Newswire (US)
Advanced Energy's Xstream(TM) Remote Plasma Source With Active
Matching Network(TM) Named One of Micro Magazine's 'Greatest Hits
for 2003' Xstream Source Provides Unsurpassed Process Flexibility,
System Throughput and Cost Efficiency FORT COLLINS, Colo., March 9
/PRNewswire-FirstCall/ -- Advanced Energy Industries today
announced that its Xstream(TM) remote plasma source with Active
Matching Network(TM) has been named one of MICRO Magazine's
"Greatest Hits of 2003." This designation, from one ofthe
industry's most respected publications, resulted from a critical
evaluation by the magazine's editorial staff of all 2003 new
product announcements in the semiconductor and advanced
microelectronics supply chain. (Photo: NewsCom:
http://www.newscom.com/cgi-bin/prnh/20030825/AEISLOGO ) Steve
Rhoades, senior vice president and general manager of AE's Control
Systems & Instrumentation group, stated, "We are honored to
have our Xstream source chosen by the editors of MICRO as one the
most outstanding products introduced in 2003. This designation
further validates the technological innovation of our Xstream
remote plasma source, which enables our customers to achieve a new
level of process flexibility, system throughput and cost savings
unmatched by other plasma sources in the industry today. The
Xstream source provides original equipment manufacturers and
chipmakers with the widest impedance operating range commercially
available." Doug Schatz, chairman and chief executive officer of
AE, noted, "We're very pleased that our patented, Xstream
technology has been recognized for the significant process benefits
it provides. This platform operates seamlessly with a broad range
of chemistries, permitting our customers to optimize their
processes -- as well as their expensive resources." The Xstream
platform fully integrates a remote plasma source, a higher-power 8
kW or a standard-power 6 kW high-efficiency power supply and a
solid-state Active Matching Network(TM). This platform
deliversreactive gases in both upstream and downstream
configurations for remote chemical vapor deposition (CVD) chamber
clean, as well as other advanced semiconductor and flat-panel
display applications. The Xstream remote plasma source provides
customers with a highly cost-effective solution that extends the
life of chamber consumables and fixtures, and reduces the particle
generation inherent with in-situ plasma sources. About Advanced
Energy Advanced Energy is a global leader in the development and
support of technologies critical to high-technology manufacturing
processes used in the production of semiconductors, flat panel
displays, data storage products, compact discs, digital video
discs, architectural glass, and other advanced product
applications. Leveraging a diverse product portfolio and technology
leadership, AE creates solutions that maximize process impact,
improve productivity and lower cost of ownership for its customers.
This portfolio includes a comprehensive line of technology
solutions in power, flow and thermal management, plasma and ion
beam sources, and integrated process monitoring and control for
original equipment manufacturers (OEMs) and end-users around the
world. AE operates in regional centers in North America, Asiaand
Europe and offers global sales and support through direct offices,
representatives and distributors. Founded in 1981, AE is a publicly
held company traded on Nasdaq National Market under the symbol
AEIS. More information can be found at
http://www.advanced-energy.com/. NOTE: Xstream and Active Matching
Network are trademarks of Advanced Energy Industries, Inc.
http://www.newscom.com/cgi-bin/prnh/20030825/AEISLOGO
http://photoarchive.ap.org/ DATASOURCE: Advanced Energy Industries
CONTACT: Marna Shillman of Corporate Communication Manager of
Advanced Energy Industries, Inc., +1-970-407-6280, or ; or Dori
Jones, Account Director of MCA, +1-650-968-8900, or , for Advanced
Energy Industries, Inc. Web site: http://www.advanced-energy.com/
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