FSI International Receives Follow-on Orders for Its ORION® and ANTARES® Systems from Leading Semiconductor Producers
December 13 2011 - 8:30AM
Business Wire
FSI International, Inc. (Nasdaq: FSII), a leading manufacturer
of surface conditioning equipment for microelectronics
manufacturing, announced today it received a follow-on order for
its ORION® Single Wafer Cleaning System from a leading
semiconductor producer to be used for BEOL applications. The
company also received a multi-unit follow-on order for its ANTARES®
Cryokinetic Cleaning System from another leading device producer.
The systems are expected to ship during fiscal 2012.*
Integrated circuit manufacturers are recognizing that the closed
chamber technology of the ORION® system provides highly efficient
removal of etch and ash by-products without causing galvanic
corrosion or changes in metal and dielectric film properties. The
process chamber design with an integrated spray bar, improves
uniformity, shortens process time, reduces chemical consumption and
enhances particle removal.
The ANTARES® System is a fully automated, single-wafer,
Cryokinetic system used for processing 200/300mm wafers with
capabilities to remove nanoscale particles. Cryokinetic processing
technology is an all-dry, chemical free process that removes
particles through impact by high-velocity cryogenic Ar/N2 aerosol,
and reduces defects without damaging the wafer surface, even on
copper and porous low-k films. The system’s highly efficient dry
cleaning solution can be used for a variety of particle removal
applications in FEOL and BEOL. Many of the leading logic device
manufacturers worldwide utilize the ANTARES® System for its defect
reduction and yield improvement benefits.
FSI International, Inc. is a global supplier of surface
conditioning equipment, technology and support services for
microelectronics manufacturing. Using the company’s broad portfolio
of cleaning products, which include batch and single-wafer
platforms for immersion, spray and cryogenic aerosol technologies,
customers are able to achieve their process performance flexibility
and productivity goals. The company’s support services programs
provide product and process enhancements to extend the life of
installed FSI equipment, enabling worldwide customers to realize a
higher return on their capital investment. For more information,
visit FSI’s website at http://www.fsi-intl.com.
“Safe Harbor” Statement Under the Private Securities
Litigation Reform Act of 1995This press release contains
certain “forward-looking” statements (*), including, but not
limited to expected shipment timing. Except for the historical
information contained herein, the matters discussed in this news
release are forward-looking statements involving risks and
uncertainties, both known and unknown, that could cause actual
results to differ materially from those in such forward-looking
statements. Such risks and uncertainties include, but are not
limited to, changes in industry conditions; order delays or
cancellations; general economic conditions; changes in customer
capacity requirements and demand for microelectronics; the extent
of demand for the company’s products and its ability to meet
demand; global trade policies; worldwide economic and political
stability; the company’s successful execution of internal
performance plans; the cyclical nature of the company’s business;
volatility of the market for certain products; performance issues
with key suppliers and subcontractors; the level of new orders; the
timing and success of current and future product and process
development programs; the success of the company’s direct
distribution organization; legal proceedings; the potential
impairment of long-lived assets; and the potential adverse
financial impacts resulting from declines in the fair value and
liquidity of investments the company presently holds; the impact of
natural disasters on parts supply and demand for products; as well
as other factors listed herein or from time to time in the
company’s SEC reports, including our latest 10-K annual report and
10-Q quarterly reports. The company assumes no duty to update the
information in this press release.
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