FSI International Receives Repeat ORION® System Order
July 07 2011 - 9:00AM
Business Wire
FSI International, Inc. (Nasdaq: FSII), a leading manufacturer
of surface conditioning equipment for microelectronics
manufacturing, announced today that it received a repeat ORION®
single wafer cleaning system order from a leading foundry producer.
The order is expected to ship in the fourth quarter of fiscal
2011.
The customer will use the system for back-end-of-line (BEOL)
cleaning processes. Foundry and logic manufacturers are finding
low-k materials and metal film stacks used for advanced devices are
much more sensitive to wet cleaning than previous generations of
BEOL processes. The closed chamber technology of the ORION® system
has demonstrated highly efficient removal of etch and ash
by-products without causing galvanic corrosion or changes in metal
and dielectric film properties.
FSI International, Inc. is a global supplier of surface
conditioning equipment, technology and support services for
microelectronics manufacturing. Using the company’s broad portfolio
of cleaning products, which include batch and single-wafer
platforms for immersion, spray, vapor and cryogenic aerosol
technologies, customers are able to achieve their process
performance flexibility and productivity goals. The company’s
support services programs provide product and process enhancements
to extend the life of installed FSI equipment, enabling worldwide
customers to realize a higher return on their capital investment.
For more information, visit FSI’s website at
http://www.fsi-intl.com.
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