Advanced Energy Launches MAXstream RPS Product Line for Chamber Clean Applications
December 10 2020 - 12:30PM
Business Wire
Extending AE’s leadership in process power, this new line of
Remote Plasma Sources delivers reliable performance at a broad
range of flow rates, increasing productivity in semiconductor
process equipment
Advanced Energy (Nasdaq: AEIS) – a global leader in highly
engineered, precision power conversion, measurement, and control
solutions – today announced the launch of its new MAXstream™ remote
plasma source (RPS) product line for plasma cleaning of process
chambers used in semiconductor device manufacturing. With offerings
available across a broad operating range, the MAXstream line
delivers higher power accuracy, best-in-class plasma ignition and
increased reliability, making it the most capable RPS solution in
the market.
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Advanced Energy's new MAXstreamTM product
line delivers higher power accuracy, best-in-class plasma ignition
and increased reliability, making it the most capable remote plasma
source solution in the market (Photo: Business Wire)
“When customers invited AE to step in and help meet the
industry’s need for a high performance and reliable RPS, we made it
happen,” said Advanced Energy Vice President and General Manager,
Semiconductor Products, Peter Gillespie. “Not only does the new
MAXstream product line provide a cost-effective and reliable RPS
solution for customers’ process tools, but it also accelerates AE’s
penetration to the approximately $150 million per year RPS market,
which has seen little innovation in recent years 1. We are
encouraged by the positive responses we have received so far and
anticipate further success as we continue shipments to multiple OEM
customers this month.”
MAXstream delivers substantial improvements over competitors’
RPS solutions. Its dual ignition core design delivers best-in-class
plasma ignition reliability. The reliable and strike-every-time
ignition means more consistent operation and less downtime.
MAXstream also leverages AE’s proven and differentiated plasma
source materials and technology to ensure long chamber life and low
particle generation.
AE’s MAXstream RPS products facilitate drop-in compatibility
with existing RPS systems to enable simple design-in compatibility
as well as seamless field upgrades. By replacing an underperforming
RPS with MAXstream, customers improve equipment productivity and
gain higher performance reliability. They also gain access to AE’s
best-in-class global service and support, with over a dozen service
centers and worldwide field service and applications support.
The MAXstream line consists of RPS systems with gas flow of 3,
6, 8, 10, and 12 liters per minute (MAXstream 300, 600, 800, 1000,
and 1200, respectively), enabling customers to optimize price and
performance for their specific process. The MAXstream 300 is
designed for lower flow applications (up to 3 liters per minute of
cleaning gas) and has a smaller form factor than the other higher
flow models.
“Plasma processes requiring chamber cleaning are used in the
production of almost every type of semiconductor chip,” said Shaun
Wilson, general manager, remote plasma sources, Advanced Energy.
“By bringing MAXstream to the market, we provide our customers a
powerful, reliable, and cost-effective solution for process chamber
cleaning. We also minimize equipment downtime and help the
semiconductor industry fulfill the demands of the data
economy.”
For detailed technical specifications, visit the MAXstream
product page.
1 VLSI Research
About Advanced Energy
Advanced Energy (Nasdaq: AEIS) is a global leader in the design
and manufacturing of highly engineered, precision power conversion,
measurement and control solutions for mission-critical applications
and processes. AE’s power solutions enable customer innovation in
complex applications for a wide range of industries including
semiconductor equipment, industrial, manufacturing,
telecommunications, data center computing and healthcare. With
engineering know-how and responsive service and support around the
globe, the company builds collaborative partnerships to meet
technology advances, propel growth for its customers and innovate
the future of power. Advanced Energy has devoted more than three
decades to perfecting power for its global customers and is
headquartered in Denver, Colorado, USA. For more information, visit
www.advancedenergy.com.
Advanced Energy | Precision. Power. Performance.
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Lora Wilson / Valerie Christopherson Global Results
Communications for Advanced Energy Industries, Inc.
aei@globalresultspr.com +1 949.306.0276
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