Advanced Energy Solid-State Matching Network Selected for Plasma Impedance Matching in <14 nm Semiconductor Etch Applications...
May 17 2017 - 11:22AM
Advanced Energy Industries, Inc. (Nasdaq:AEIS), a global leader in
precision power conversion, announced today that its solid-state
matching network has been selected by one of the world’s largest
suppliers of semiconductor manufacturing equipment. The ultra-fast
Navigator® II FastCap™ solid-state matching network provides
greater capability, productivity and performance, enabling
increased predictability and reproducibility in sub-14 nm plasma
processes.
The latest addition to the Navigator II platform, FastCap
solid-state technology enables tuning speeds more than 100X faster
than conventional, mechanically operated, variable vacuum
capacitors. When combined with Navigator II digital instrumentation
and controls, the patented, hot-switchable capacitors follow the
fastest process transitions in real time—offering a distinct
advantage over standard vacuum capacitors and resulting in improved
run-to-run process repeatability.
Yuval Wasserman, president and CEO of Advanced Energy, said,
"Customer partnerships in evaluating new technologies are core to
our leadership in precision power. This design win reflects our
deep expertise in RF power and a collaborative effort to understand
and respond to unique process challenges and dynamic plasma
characteristics, in order to produce a stable and significant
tune-time advantage. The best-selling Navigator II platform—the
industry’s first digital matching network—combined with FastCap
solid-state technology is the answer to the manufacturing of
thinner films and finer features in rapid, complex, multi-step
processes.”
Advanced Energy leads in RF power conversion with more than
400,000 units shipped worldwide. The FastCap solution is qualified
for use with AE's Paramount® line of RF power
supplies. Currently in volume production, this
product is available for many PECVD and etch bias applications.
About Advanced Energy
Advanced Energy (Nasdaq:AEIS) is a global leader in innovative
power and control technologies for high-growth, precision power
solutions for thin films processes and industrial applications.
Advanced Energy is headquartered in Fort Collins, Colorado, with
dedicated support and service locations around the world. For more
information, go to www.advanced-energy.com.
CONTACT:
Christina Liebman
Director, Corporate Marketing
Advanced Energy Industries, Inc.
+1.970.407.6444
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