Advanced Energy Introduces Paramount(R) 2 MHz Mid-Frequency Power-Delivery System at SEMICON(R) Korea 2013
January 29 2013 - 5:00PM
Advanced Energy Industries, Inc. (Nasdaq:AEIS) today introduced its
Paramount® 2 MHz power supply at SEMICON® Korea 2013. The complete
Paramount platform, which spans frequencies from 400 kHz to 60 MHz,
provides enabling plasma management in complex thin-film processing
environments. In sub 22-nm pulsing applications, the
industry-leading Paramount RF pulsing provides synchronized,
multi-frequency RF power to improve etch rate selectivity,
substrate profile control and film uniformity in a wide operating
window.
The 2 MHz mid-frequency addition completes the Advanced Energy
(AE) Paramount suite of RF power delivery systems and satisfies the
industry's exacting requirements for PECVD, dielectric etch and
conductor etch applications. Its built-in ability to synchronize
with other Paramount units simplifies power supply integration and
operation across multiple frequencies, while its advanced pulsing
features—such as user-selectable pulse and phase synchronization
and sophisticated arc management—provide semiconductor tool
manufacturers precise RF control to innovate at the sub-22 nm level
and beyond.
Yuval Wasserman, president of AE Thin Films, said, "We expect
the comprehensive Paramount product platform to become further
established across the industry in etch and deposition
processes—both in semiconductor, with the development of advanced
materials and new device geometries, and in other thin-film
processing applications. The common controls, measurement and
advanced features facilitate process integration and optimization
across multiple frequencies without the need for customization or
complicated protocols. In addition, the Paramount's advanced
pulsing technology, combined with our Navigator II matching
network's tune-while pulsing capability, delivers exceptional
plasma control."
Advanced Energy will showcase its broad line of industry-leading
products and worldwide support for next-generation technologies at
the SEMICON Korea exhibition, including:
- AE's Paramount RF power-delivery platform, including the new
Paramount MF product;
- Navigator II digital matching network, incorporating
tune-while-pulsing capability for highly stable plasma and smooth
power delivery;
- Sekidenko optical fiber thermometers (OFT), delivering
high-speed, multi-channel wafer temperature monitoring and
control;
- Xstream® remote plasma source with Active Matching Network™ for
reliable chamber clean
- Ascent® and Pinnacle® Plus DC power supplies, featuring power
operation up to 60 kW and supporting a wide variety of thin-films
applications; and
- AE's recently acquired Solvix line of DC and pulsed DC power
supplies for metallic and reactive thin-film sputtering and
arc-bias solutions.
SEMICON Korea, co-located with LED Korea, will take place at the
COEX Exhibition Center in Seoul, January 30 to February 1. To learn
more about AE's featured products, please visit the company in Hall
A, booth 2520, and the company's event website at
http://www.advanced-energy.com/en/sck2013.html.
About Advanced Energy
Advanced Energy is a global leader in reliable power conversion
solutions used in thin-film plasma manufacturing processes and
solar energy generation. Founded in 1981, Advanced Energy is
headquartered in Fort Collins, Colorado, with dedicated support and
service locations around the world. For more information, go to
www.advanced-energy.com.
CONTACT: Peter Gillespie
Advanced Energy Industries, Inc.
+1.408.574.2534
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