Lam Research Corporation Ships 3,000th Single-Wafer Spin Clean Process Module
April 19 2010 - 11:00AM
Business Wire
Lam Research Corporation (NASDAQ:LRCX), a major supplier of
semiconductor wafer fabrication equipment and services, today
announced it has shipped the 3,000th single-wafer SEZ® spin clean
technology process module to a leading DRAM manufacturer. This
DV-Prime™ wet clean system will be used for multiple applications,
including cleaning high-aspect-ratio structures (up to 40:1). The
system was selected for its multi-chemistry flexibility and
advanced capabilities, including new drying technology that
minimizes collapse of fragile features. Shipment of this 3,000th
spin clean module continues Lam’s leadership in maintaining the
largest installed base of single-wafer wet clean modules.
“We are extremely proud of the continued success of our spin
clean products as highlighted by this 3,000th shipment,” said Jeff
Marks, vice president and general manager, Clean Product Group, Lam
Research. “This milestone shipment demonstrates customer confidence
in the advanced capability delivered by recent innovations in our
spin clean design.”
First introduced over 20 years ago, Lam’s single-wafer SEZ spin
clean technology pioneered the industry transition from batch to
single-wafer wet processing and is widely used in
back-end-of-the-line applications. With recent design advances –
including improved particle removal efficiency, new drying
technology, and higher throughput – spin technology is now being
used by customers for several critical front-end-of-the-line (FEOL)
applications. These include gate module cleans, pre-cleans,
photoresist strip, and silicide cleans, where the numerous
materials involved require significant process and chemistry
flexibility.
“All of our recently shipped FEOL spin clean modules are
configured with multiple chemistries,” added Marks, “and customers
are reporting that we provide greater flexibility in chemical
management on our spin clean platforms than our competitors.”
Lam’s spin technology is used in a broad range of applications,
including particle, polymer, and residue removal; substrate
thinning; photoresist removal; and backside and bevel cleaning. It
is also well-suited for several critical FEOL and
middle-of-the-line applications, where new capabilities deliver
advanced performance specifications, increased productivity, and a
lower cost of ownership. Together, the Company’s spin wet clean,
linear wet clean, and plasma bevel clean products provide a diverse
single-wafer clean product portfolio that addresses a wide range of
current and future wafer cleaning challenges.
Statements made in this press release which are not statements
of historical fact are forward-looking statements and are subject
to the safe harbor provisions created by the Private Securities
Litigation Reform Act of 1995. Such forward-looking statements
relate, but are not limited, to the customer’s actual and intended
use for the spin clean tools, and the actual performance and
capabilities of all the tools offered by Lam. These forward-looking
statements are based on current expectations and are subject to
uncertainties and changes in condition, significance, value and
effect as well as other risks detailed in documents filed with the
Securities and Exchange Commission, including specifically the
report on Form 10-K for the year ended June 28, 2009, and Form 10-Q
for the quarter ended December 27, 2009, which could cause actual
results to vary from expectations. The Company undertakes no
obligation to update the information or statements made in this
press release.
Editor Background:
Lam Research Corporation is a major supplier of wafer
fabrication equipment and services to the world’s semiconductor
industry, where the Company has been advancing semiconductor
manufacturing for 30 years. As a technology and market share leader
in plasma etch and single-wafer clean, Lam Research is leveraging
its combined expertise to address some of today’s most advanced
semiconductor processing challenges, providing customers with an
expanded product portfolio. Headquartered in Fremont, California,
Lam Research maintains a global network of service facilities
throughout North America, Asia, and Europe to meet the complex and
changing needs of its global customer base. Lam’s common stock
trades on The NASDAQ Global Select MarketSM under the symbol LRCX.
Lam Research is a NASDAQ-100® company. For more information, visit
http://www.lamresearch.com.
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