Advanced Energy Announces Alta Digitally Controlled RF Power Delivery Platform for Industrial Plasma Applications
May 02 2022 - 8:00AM
Business Wire
New RF power supplies and tap-selectable matching network
provide precise, repeatable control and dynamic response in
next-generation plasma processes
Advanced Energy Industries, Inc. (Nasdaq: AEIS) – a global
leader in highly engineered, precision power conversion,
measurement and control solutions – today announced a comprehensive
RF power delivery solution that combines advanced
digitally-controlled power supplies with accurate digital impedance
matching network. Designed for thin-film industrial applications,
the ALTA™ platform ensures versatile, accurate and repeatable
control that enhances process stability and provides best-in-class
yield.
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The ALTA power supplies incorporate full
digital control and dynamic response to rapid plasma changes to
ensure robust and reliable delivery. (Photo: Business Wire)
The ALTA platform includes a 13.56 MHz rack-mounted power supply
with power levels from 1.5 kW to 6 kW and a 13.56 MHz tapped
digital matching network. The series is optimized for plasma-based
industrial processes demanding accurate, reliable and repeatable
precision power delivery, including solar panel, flat panel
display, precision optics and automotive glass manufacturing.
“As thin-film manufacturing technologies evolve and rapid plasma
transitions become the norm, there is a growing demand for power
solutions that combine precise RF control with dynamic response to
rapid plasma changes,” said Dhaval Dhayatkar, Senior Director of
Marketing, Plasma Power at Advanced Energy. “The ALTA power supply
offers several advanced features including frequency tuning,
real-time power and impedance measurement, tight power regulation,
arc management and phase synchronization.”
The ALTA power supplies incorporate full digital control and
dynamic response to rapid plasma changes to ensure robust and
reliable delivery. The ALTA matching network provides tuning
versatility with a tapped coil system that can be easily adjusted
to accommodate a variety of impedance ranges. Repeatable response
minimizes delivered power deviations both between matches and
run-to-run under a variety of operating conditions.
By utilizing advanced digital architecture, the ALTA platform
enables extremely precise process measurement and control, as well
as seamless system integration with state-of-the-art communication
interfaces such as EtherCAT and Profinet.
For detailed product information and technical specifications,
visit:
https://www.advancedenergy.com/products/plasma-power-generators/rf-plasma-generators/alta/
About Advanced Energy
Advanced Energy Industries, Inc. (Nasdaq: AEIS) is a global
leader in the design and manufacture of highly engineered,
precision power conversion, measurement and control solutions for
mission-critical applications and processes. Advanced Energy’s
power solutions enable customer innovation in complex applications
for a wide range of industries including semiconductor equipment,
industrial, manufacturing, telecommunications, data center
computing and healthcare. With engineering know-how and responsive
service and support for customers around the globe, the company
builds collaborative partnerships to meet technology advances,
propels growth of its customers and innovates the future of power.
Advanced Energy has devoted four decades to perfecting power. It is
headquartered in Denver, Colorado, USA.
For more information, visit www.advancedenergy.com.
Advanced Energy | Precision. Power. Performance.
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Simon Flatt Grand Bridges for Advanced Energy Industries, Inc.
aei@grandbridges.com +1 310.529.0321
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