Advanced Energy(R) Showcases Enabling Pulsing Technology Solutions at SEMICON(R) West 2013
July 09 2013 - 8:00AM
Advanced Energy Industries, Inc. (Nasdaq:AEIS) today announced that
it has expanded its advanced pulsing RF systems to now offer
complete and enabling plasma management in complex thin-film
process environments. The Advanced Energy (AE) Paramount suite of
RF power delivery systems provides synchronized, pulsed RF power to
improve etch rate selectivity, substrate profile control and film
uniformity in a wide operating window. The Navigator II digital
matching network incorporates advanced tune-while-pulsing
capability for highly stable plasma and controlled power delivery.
The Paramount and Navigator II platforms are designed to be used
together in an advanced pulsing RF system, offering exceptional
plasma control for single- and multi-level pulsing in PECVD and
high-aspect ratio etch applications.
Advanced Energy will showcase its Paramount product platform,
which spans frequencies from 400 kHz to 60 MHz, and its Navigator
II matching network this week at the SEMICON West exhibition in San
Francisco. In tandem with the semiconductor show, the company will
host technology seminars where it will detail its latest pulsed RF
and remote plasma source products that semiconductor tool
manufacturers will use for 2X/1X technology nodes.
Yuval Wasserman, president of AE Thin Films said, "SEMICON West
provides a great opportunity for us to connect with our customers
in an environment that is immersed in innovation. At our exhibit
and our technical seminars, we look forward to sharing our latest
technologies, discussing current and future thin-films processing
challenges and continuing to promote innovation through partnership
with our customers."
In addition to its featured technologies, Advanced Energy will
display its Sekidenko optical fiber thermometers (OFT) and its
recently acquired Solvix line of DC and pulsed DC power
supplies.
SEMICON West, co-located with Intersolar North America, will
take place at the Moscone Convention Center in San Francisco, July
9 – 11. To learn more about AE's advanced pulsing and thin-film
technologies, please visit the company in the South Hall A, booth
2613, and the company's event website at
http://www.advanced-energy.com/en/scw2013.html. AE will also
exhibit at Intersolar North America in the West Hall of the Moscone
Convention Center, booth L-209.
About Advanced Energy
Advanced Energy is a global leader in reliable power conversion
solutions used in thin-film plasma manufacturing processes and
solar energy generation. Founded in 1981, Advanced Energy is
headquartered in Fort Collins, Colorado, with dedicated support and
service locations around the world. For more information, go to
www.advanced-energy.com.
CONTACT: Jim Guilmart
Vice President, Sales & Marketing
Advanced Energy Industries, Inc.
+1.970.407.6318
Advanced Energy Industries (NASDAQ:AEIS)
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