FSI International, Inc. Receives ANTARES® Order from Leading Asian Foundry
January 11 2011 - 10:41AM
Business Wire
FSI International, Inc. (Nasdaq: FSII), a leading supplier of
surface conditioning equipment for microelectronics manufacturing,
announced today that a leading Asia-based foundry has ordered an
ANTARES® CryoKinetic Cleaning System. The evaluation system will be
used for particle removal after in-line wafer testing and other
high defectivity steps to focus on improving overall device yield.
The system is expected to ship in January 2011. FSI has over 150
ANTARES process chambers in production at foundry and logic device
producers worldwide.
The ANTARES® System is a fully automated, single-wafer,
CryoKinetic system used for processing 200/300mm wafers with
capabilities to remove nanoscale particles. CryoKinetic processing
technology is an all-dry, non-reactive process that removes
particles through impact by high-velocity cryogenic Ar/N2 aerosol,
and reduces defects without damaging the wafer surface, even on
copper and porous low-k films. The system’s highly efficient dry
cleaning solution can be used for a variety of particle removal
applications in FEOL and BEOL.
FSI International, Inc. is a global supplier of surface
conditioning equipment, technology and support services for
microelectronics manufacturing. Using the company’s broad portfolio
of cleaning products, which include batch and single-wafer
platforms for immersion, spray, vapor and cryogenic aerosol
technologies, customers are able to achieve their process
performance, flexibility and productivity goals. The company’s
support services programs provide product and process enhancements
to extend the life of installed FSI equipment, enabling worldwide
customers to realize a higher return on their capital investment.
For more information, visit FSI’s website at
http://www.fsi-intl.com.
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