Industry-Leading Taiwanese Foundries Place Additional Production Orders for Mattson Technology's Strip Systems
March 10 2004 - 8:30AM
PR Newswire (US)
Industry-Leading Taiwanese Foundries Place Additional Production
Orders for Mattson Technology's Strip Systems Aspen II Strip System
of Choice to Support Volume Production FREMONT, Calif., March 10
/PRNewswire-FirstCall/ -- Mattson Technology, Inc. , a leading
supplier of advanced process equipment used to manufacture
semiconductors, today announced that it has received follow-on
purchase orders for its Aspen II Strip systems from two of the
world's largest semiconductor foundries. The systems, some of which
have already been shipped to the foundries' manufacturing
facilities in Taiwan, will be used for the volume production of
DRAM and logic devices. These orders follow the foundries' purchase
last year of multiple Mattson 300 mm systems for their advanced 300
mm fabs. "Our customers lead the semiconductor industry in foundry
operations, and they continue to rely on our tools for not only
their 300 mm production ramps but also for their 200 mm volume
manufacturing needs," said Dr. Bruno Doetsch, senior director and
general manager of Asian operations of Mattson Technology. "The
high-productivity Aspen II Strip system was selected by these
industry-leading foundries as the system of choice for BEOL and
FEOL photoresist processes because it meets their technical and
economic requirements with its proven manufacturing reliability,
process flexibility and cost-effectiveness." The Aspen Strip system
features Mattson Technology's proprietary inductively coupled
plasma (ICP) source and effectively strips resist and residue,
reducing the need for post-strip chemical processing. The Aspen
Strip system offers advanced technology on a high-throughput
platform, providing process performance and low cost of ownership
advantages to chipmakers for advanced device manufacturing. About
Mattson Technology, Inc. Mattson Technology, Inc. is a leading
supplier of semiconductor wafer processing equipment used in the
fabrication of integrated circuits. The company's dry strip and RTP
equipment utilize innovative technology to deliver advanced
processing capabilities on high-productivity platforms for the
fabrication of current- and next-generation devices. Since
beginning operations in 1989, the company's core vision has been to
help bring technologyleadership and productivity gains to
semiconductor manufacturers worldwide. For more information, please
contact Mattson Technology, Inc., 47131 Bayside Parkway, Fremont,
Calif. 94538. Telephone: 800-MATTSON/ 510-657-5900. Fax:
510-492-5911. Internet: http://www.mattson.com/. CONTACT: Mattson
Technology Contact Lauren Vu Mattson Technology, Inc. tel
510-492-6518 fax 510-492-2800 DATASOURCE: Mattson Technology, Inc.
CONTACT: Lauren Vu of Mattson Technology, Inc., +1-510-492-6518, or
fax, +1-510-492-2800, or Web site: http://www.mattson.com/
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