Major European Device Manufacturer Orders Additional Advanced Plasma Etch Systems from Tegal
May 29 2007 - 9:00AM
Business Wire
Tegal Corporation (Nasdaq:TGAL) today announced that a major
European integrated device manufacturer had placed an order with
the Company for three additional new 6540 advanced plasma etch
systems. The 6540 systems, directed at an application that enables
the production of high-K, de-coupling capacitors incorporated into
cell phones and other wireless devices, will be installed in a
production facility in Europe over the next several months. �We are
very pleased to have won this follow-on production order from one
of our most important customers,� said Thomas Mika, President and
CEO of Tegal. �We achieved this sale based on being able to deliver
unique process technology, continuously improving our process and
hardware in a high volume manufacturing environment, and
maintaining a company-wide commitment to the success of this
project for our customer.� �Tegal has developed significant,
patented technology, along with unique process know-how in the area
of high-K dielectrics and non-volatile metals,� said Vahan
Tchakerian, Tegal�s Vice President of Global Sales. �Such materials
are increasingly important for meeting the size, integration and
power requirements of devices incorporated into a wide range of
wireless products.� The Tegal 6540 is a high-density plasma etch
tool featuring the unique Hre-� reactor, and Tegal�s patented
dual-frequency RF power technology and magnetic plasma confinement.
The system is a critical enabler for etching noble metal electrode
and capacitor materials, including PZT, as well as other
ferroelectric, magnetic, high-K dielectric, compound semiconductor
and interconnect materials. Safe Harbor Statement Except for
historical information, matters discussed in this news release
contain forward-looking statements within the meaning of Section
27A of the Securities Act and Section 21E of the Exchange Act.
Forward-looking statements, which are based on assumptions and
describe our future plans, strategies and expectations, are
generally identifiable by the use of the words "anticipate,"
"believe," "estimate," "expect," "intend," "project" or similar
expressions. These forward-looking statements are subject to risks,
uncertainties and assumptions about the Company including, but not
limited to industry conditions, economic conditions, acceptance of
new technologies and market acceptance of the Company's products
and services. All forward-looking statements attributable to us or
persons acting on our behalf are expressly qualified in their
entirety by the cautionary statements in this paragraph. For a
further discussion of these risks and uncertainties, please refer
to the Company's periodic filings with the Securities and Exchange
Commission. About Tegal Tegal provides process and equipment
solutions to leading edge suppliers of advanced semiconductor and
nanotechnology devices. Incorporating unique, patented etch and
deposition technologies, Tegal�s system solutions are backed by
over 35 years of advanced development and over 100 patents. Some
examples of devices enabled by Tegal technology are energy
efficient memories found in portable computers, cell phones, PDAs
and RFID applications; megapixel imaging chips used in digital and
cell phone cameras; power amplifiers for portable handsets and
wireless networking gear; and MEMS devices like accelerometers for
automotive airbags, microfluidic control devices for ink jet
printers; and laboratory-on-a-chip medical test kits. For more
information about Tegal Corporation, visit: www.tegal.com
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