MTSN Mattson Technology, Inc.

Mattson Technology, Inc. (NASDAQ: MTSN), a leading supplier of advanced process equipment used to manufacture semiconductors, today announced that it has won acceptance for its Helios® XP rapid thermal processing (RTP) system from another leading semiconductor manufacturer. The Helios XP, which was selected by the customer based on its excellent processing performance and lower cost-of-ownership, is now in volume production of advanced logic chips.

"The Helios XP's innovative heating design minimizes wafer stress and its unique temperature measurement technology provides the ultra-low temperature control required for advanced transistor junction interface control," said Johannes Keppler, RTA Business leader of Mattson Technology's Thermal Products Group. "The system delivers the greatest temperature flexibility through a single unified configuration, and its field-proven platform delivers higher reliability and process control. These product advantages combine to boost throughput and productivity for 300 millimeter logic production, enabling our customers to produce ultra-shallow junctions and other advanced transistor structures on a high-volume scale."

Keppler continued, "This is a tremendously satisfying win for us because it further demonstrates the kind of results we are delivering in the logic arena through our commitment to our customers' success. This order expands our installed base of RTP systems in the foundry/logic area and is the latest in a series of wins for the Helios XP, which is now successfully established in the foundry, logic and memory areas."

About Mattson Technology, Inc. Mattson Technology, Inc. designs, manufactures and markets semiconductor wafer processing equipment used in the fabrication of integrated circuits. We are a leading supplier of plasma and rapid thermal processing equipment to the global semiconductor industry, and operate in three primary product sectors: Dry Strip, Rapid Thermal Processing and Etch. Through manufacturing and design innovation, we have produced technologically advanced systems that provide productive and cost-effective solutions for customers fabricating current- and next-generation semiconductor devices. For more information, please contact Mattson Technology, Inc., 47131 Bayside Parkway, Fremont, CA, 94538. Telephone: (800) MATTSON / (510) 657-5900. Internet: www.mattson.com.

"Safe Harbor" Statement Under the Private Securities Litigation Reform Act of 1995: This news release contains forward-looking statements. All statements other than statements of historical fact are statements that could be deemed forward-looking statements, including but not limited to statements of the plans, strategies and objectives of management for future operations. Forward-looking statements address matters that are subject to a number of risks and uncertainties that can cause actual results to differ materially from those expressed or implied by such forward-looking statements and assumptions. Such risks and uncertainties include, but are not limited to: macroeconomic and geopolitical trends and events; end-user demand for semiconductors; customer demand for semiconductor manufacturing equipment; the timing of significant customer orders for the Company's products; customer acceptance of delivered products and the Company's ability to collect amounts due upon shipment and upon acceptance; the Company's ability to timely manufacture, deliver and support ordered products; the Company's ability to bring new products to market and to gain market share with such products; customer rate of adoption of new technologies; risks inherent in the development of complex technology; the timing and competitiveness of new product releases by the Company's competitors; the Company's ability to align its cost structure with market conditions; and other risks and uncertainties described in the Company's Forms 10-K, 10-Q and other filings with the Securities and Exchange Commission. The Company assumes no obligation to update the information provided in this news release.

Mattson Technology Contact Lauren Vu Mattson Technology, Inc. tel +1-510-492-6250 fax +1-510-492-5914 lauren.vu@mattson.com Investor Contact Laura Guerrant-Oiye Guerrant Associates tel +1-808-882-1467 lguerrant@guerrantir.com