MTSN Mattson Technology, Inc.

Mattson Technology, Inc. (NASDAQ: MTSN), a leading supplier of advanced process equipment used to manufacture semiconductors, today announced that it has received orders for multiple SUPREMA photoresist strip systems from a leading semiconductor manufacturer. The systems are scheduled to ship in the first quarter of 2012 and will be used for advanced gate strip and other critical ashing applications for volume production of advanced logic devices through the next-generation technology nodes.

"Our customer selected the SUPREMA based on the device performance benefits achieved with the system running photoresist strip processes over sensitive gate stack materials at the most advanced technology nodes," said Rene George, vice president and general manager of Mattson Technology's Plasma Products Group. "This first volume order for SUPREMA by a logic production fab further extends Mattson Technology's share in the strip arena and reinforces the system's ability to deliver high-performance, repeatable and reliable strip processes that our customers require to manufacture next-generation IC devices."

About Mattson Technology, Inc. Mattson Technology, Inc. designs, manufactures and markets semiconductor wafer processing equipment used in the fabrication of integrated circuits. The company is a leading supplier of plasma and rapid thermal processing equipment to the global semiconductor industry, and operates in three primary product sectors: dry strip, rapid thermal processing (RTP) and etch. Through manufacturing and design innovation, Mattson Technology produces technologically advanced systems that provide productive and cost-effective solutions for customers fabricating current- and next-generation semiconductor devices. The company serves foundries, and memory and logic integrated device manufacturers in the United States, Europe, China, Japan, Korea, Singapore, Taiwan and other Asian countries. For more information, please contact Mattson Technology, Inc., 47131 Bayside Parkway, Fremont, CA, 94538. Telephone: +1-800-MATTSON/+1-510-657-5900. Internet: www.mattson.com.

"Safe Harbor" Statement Under the Private Securities Litigation Reform Act of 1995: This news release contains forward-looking statements. All statements other than statements of historical fact are statements that could be deemed forward-looking statements, including but not limited to statements of the plans, strategies and objectives of management for future operations. Forward-looking statements address matters that are subject to a number of risks and uncertainties that can cause actual results to differ materially from those expressed or implied by such forward-looking statements and assumptions. Such risks and uncertainties include, but are not limited to: macroeconomic and geopolitical trends and events; end-user demand for semiconductors; customer demand for semiconductor manufacturing equipment; the timing of significant customer orders for the Company's products; customer acceptance of delivered products and the Company's ability to collect amounts due upon shipment and upon acceptance; the Company's ability to timely manufacture, deliver and support ordered products; the Company's ability to bring new products to market and to gain market share with such products; customer rate of adoption of new technologies; risks inherent in the development of complex technology; the timing and competitiveness of new product releases by the Company's competitors; the Company's ability to align its cost structure with market conditions; and other risks and uncertainties described in the Company's Forms 10-K, 10-Q and other filings with the Securities and Exchange Commission. The Company assumes no obligation to update the information provided in this news release.

Mattson Technology Contact Lauren Vu Mattson Technology, Inc. tel +1-510-492-6250 fax +1-510-492-5914 lauren.vu@mattson.com Investor Contact Laura Guerrant-Oiye Guerrant Associates tel +1-808-882-1467 lguerrant@guerrantir.com