Mattson Technology Advanced Strip and RTP Systems Installed at Major Taiwanese Manufacturers
September 07 2005 - 9:45AM
PR Newswire (US)
FREMONT, Calif., Sept. 7 /PRNewswire-FirstCall/ -- Mattson
Technology, Inc. (NASDAQ:MTSN), a leading supplier of advanced
process equipment used to manufacture semiconductors, today
announced that two major Taiwanese manufacturers, a foundry and a
DRAM chipmaker, have again selected its 300 mm strip and RTP
technologies for advanced chip production. Multiple Aspen III
Highlands strip tools were installed in two of the foundry's 300 mm
fabs for low-k/copper processing, and the Helios RTP system is
being used for advanced transistor applications to support the
expansion of the DRAM chipmaker's 300 mm fab. "Our Aspen III
Highlands and Helios systems' proven reliability, superior process
control and low cost-of-ownership have made them attractive to
foundries, as well as DRAM and logic fabs," said Randy Y. Matsuda,
Mattson Technology's Global Business Operations vice president
& general manager, Asia. "These latest follow-on orders reflect
the strength of our presence in Taiwan and demonstrate that leading
semiconductor manufacturers value the advanced technological
capabilities, processing flexibility and high productivity
advantages of our 300 mm tools." Featuring Mattson's proprietary
inductively coupled plasma (ICP) source technology, the Aspen III
Highlands is an advanced strip system used for removing resist,
residue and barrier layer for low-k/copper applications. The Helios
addresses the most demanding RTP applications, including nickel
silicide formation and ultra-shallow junction spike anneals,
enabled by an advanced model-based temperature control for high
productivity, excellent processing performance and superior
cost-of-ownership. About Mattson Technology, Inc. Mattson
Technology, Inc. is the leading supplier of dry strip equipment and
the second largest supplier of rapid thermal processing equipment
in the global semiconductor industry. The company's strip and RTP
equipment utilize innovative technology to deliver advanced
processing performance and productivity gains to semiconductor
manufacturers worldwide for the fabrication of current- and
next-generation devices. For more information, please contact
Mattson Technology, Inc., 47131 Bayside Parkway, Fremont, Calif.
94538. Telephone: (800) MATTSON/(510) 657-5900. Fax: (510)
492-5911. Internet: http://www.mattson.com/. DATASOURCE: Mattson
Technology, Inc. CONTACT: Tanja Froehlingsdorf of Mattson
Technology, Inc., +1-510-492-6342, or fax, +1-510-492-2800, or Web
site: http://www.mattson.com/
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