MTSN Mattson Technology, Inc.

Mattson Technology, Inc. (NASDAQ: MTSN), a leading supplier of advanced process equipment used to manufacture semiconductors, today announced that it has received multiple follow-on orders for its SUPREMA photoresist strip systems from major customers fabs in Asia, Europe and the US for volume production of advanced logic, foundry and flash memory devices through the 3X nanometer (nm) and below technology nodes. The systems began shipping in Q3 2011 and will be used at these customers' fabs for applications including bulk, low-dose implant strip (LDIS), high-dose implant strip (HDIS), high-k strip and post-etch residue removal.

"Our customers are using SUPREMA for both front-end-of-line and back-end-of-line applications as the system provides the highest levels of technology, reliability and productivity for bulk and high-dose implant strip at advanced nodes," said Rene George, vice president and general manager of Mattson Technology's Plasma Products Group. "SUPREMA continues to win customers as a result of its high productivity, low cost of ownership and technology extendibility through the 3X nanometer node and beyond."

"These latest follow-on orders further strengthen our penetration of the foundry, logic and memory markets, reinforcing our market share gains and strip technology leadership. We will continue to deliver flexible, high-performance strip solutions to help our global customers meet the increasingly demanding productivity requirements of advanced IC manufacturing," concluded George. About Mattson Technology, Inc. Mattson Technology, Inc. designs, manufactures and markets semiconductor wafer processing equipment used in the fabrication of integrated circuits. The Company is a leading supplier of plasma and rapid thermal processing equipment to the global semiconductor industry, and operates in three primary product sectors: dry strip, rapid thermal processing (RTP) and etch. Through manufacturing and design innovation, Mattson Technology produces technologically advanced systems that provide productive and cost-effective solutions for customers fabricating current- and next-generation semiconductor devices. The Company serves foundries, and memory and logic integrated device manufacturers in the United States, Europe, China, Japan, Korea, Singapore, Taiwan and other Asian countries. For more information, please contact Mattson Technology, Inc., 47131 Bayside Parkway, Fremont, CA, 94538. Telephone: +1-800-MATTSON/+1-510-657-5900. Internet: www.mattson.com.

"Safe Harbor" Statement Under the Private Securities Litigation Reform Act of 1995: This news release contains forward-looking statements. Forward-looking statements address matters that are subject to a number of risks and uncertainties that can cause actual results to differ materially. Such risks and uncertainties include, but are not limited to: end-user demand for semiconductors; customer demand for semiconductor manufacturing equipment; the timing of significant customer orders for the Company's products; customer acceptance of delivered products and the Company's ability to collect amounts due upon shipment and upon acceptance; the Company's ability to timely manufacture, deliver and support ordered products; the Company's ability to bring new products to market and to gain market share with such products; customer rate of adoption of new technologies; risks inherent in the development of complex technology; the timing and competitiveness of new product releases by the Company's competitors; the Company's ability to align its cost structure with market conditions; and other risks and uncertainties described in the Company's Forms 10-K, 10-Q and other filings with the Securities and Exchange Commission. The Company assumes no obligation to update the information provided in this news release.

Mattson Technology Contact Lauren Vu Mattson Technology, Inc. tel +1-510-492-6250 fax +1-510-492-5914 lauren.vu@mattson.com Investor Contact Laura Guerrant-Oiye Guerrant Associates tel +1-808-882-1467 lguerrant@guerrantir.com