MTSN Mattson Technology, Inc.

Mattson Technology, Inc. (NASDAQ: MTSN), a leading supplier of advanced process equipment used to manufacture semiconductors, today announced that a major foundry has placed follow-on orders for multiple Suprema photoresist strip systems for expansion of its latest fab. The Supremas will be used in front-end-of-line (FEOL), mid-of-line (MoL), and back-end-of-line (BEOL) strip applications for high-volume production at the 3X nanometer (nm) technology nodes and advanced device development at the 2X nm nodes. The systems have already begun shipment in the fourth quarter of 2010.

"These follow-on orders validate our customer's confidence in the Suprema's reliability, productivity, and extendibility for volume-production expansion and future node development," said Rene George, vice president and general manager of Mattson Technology's Plasma Products Group. "As the process tool of record for this foundry's 32 nm line, Suprema is qualified on all FEOL strip applications -- including bulk, high-dose implant strip (HDIS), low-dose implant strip (LDIS) -- and provides the innovative strip technology required to address the BEOL cleaning challenges associated with advanced process nodes."

"These latest follow-on orders expands Mattson Technology's presence in the foundry segment and reinforces the Suprema system's strip leadership," continued George. "We will continue to provide our long-time customer with advanced strip systems that deliver the high productivity, low cost of ownership, and technology extendibility it requires for leading-edge device production and next-generation process development."

About Mattson Technology, Inc.

Mattson Technology, Inc. designs, manufactures and markets semiconductor wafer processing equipment used in the fabrication of integrated circuits. We are a leading supplier of plasma and rapid thermal processing equipment to the global semiconductor industry, and operate in three primary product sectors: Dry Strip, Rapid Thermal Processing and Etch. Through manufacturing and design innovation, we have produced technologically advanced systems that provide productive and cost-effective solutions for customers fabricating current- and next-generation semiconductor devices. For more information, please contact Mattson Technology, Inc., 47131 Bayside Parkway, Fremont, CA, 94538. Telephone: (800) MATTSON/(510) 657-5900. Internet: www.mattson.com.

"Safe Harbor" Statement Under the Private Securities Litigation Reform Act of 1995: This news release contains forward-looking statements. Forward-looking statements address matters that are subject to a number of risks and uncertainties that can cause actual results to differ materially. Such risks and uncertainties include, but are not limited to: end-user demand for semiconductors; customer demand for semiconductor manufacturing equipment; the timing of significant customer orders for the Company's products; customer acceptance of delivered products and the Company's ability to collect amounts due upon shipment and upon acceptance; the Company's ability to timely manufacture, deliver and support ordered products; the Company's ability to bring new products to market and to gain market share with such products; customer rate of adoption of new technologies; risks inherent in the development of complex technology; the timing and competitiveness of new product releases by the Company's competitors; the Company's ability to align its cost structure with market conditions; and other risks and uncertainties described in the Company's Forms 10 K, 10-Q and other filings with the Securities and Exchange Commission. The Company assumes no obligation to update the information provided in this news release.

Mattson Technology Contact Lauren Vu Mattson Technology, Inc. tel +1-510-492-6250 fax +1-510-492-5930 lauren.vu@mattson.com Investor Contact Laura Guerrant-Oiye Guerrant Associates tel +1-808-882-1467 lguerrant@guerrantir.com