Mattson Technology Millios System at Fraunhofer CNT Selected for Development of Advanced Millisecond Anneal Applications
October 27 2010 - 6:30AM
Marketwired
Mattson Technology, Inc. (NASDAQ: MTSN), a leading supplier of
advanced process equipment used to manufacture semiconductors,
today announced that its Millios™ system, which has been upgraded
with the latest temperature measurement and control features at the
Fraunhofer Center Nanoelectronic Technologies (CNT), has been
selected for joint projects with CNT's leading IC partners for the
development of advanced millisecond anneal applications at the 3X
nanometer technology nodes and below.
"CNT's objective is to accelerate the introduction of new
semiconductor technologies from R&D to production," said
Fraunhofer CNT's Professor Dr. Peter Kücher. "We look forward to
continuing to work with Mattson Technology to develop enabling
process technologies that will help our semiconductor partners
achieve increasingly smaller geometries and fabricate more powerful
chips in the next generation of IC manufacturing."
"The Millios installed at this key semiconductor and
nanoelectronics research center was selected for the system's
demonstrated processing flexibility and unmatched temperature
measurement and control to address critical transistor scaling
challenges," said Andreas Toennis, senior vice president and
general manager of Mattson Technology's Thermal Products Group.
"Built on Mattson's production-proven Helios platform, Millios
features a patented arc lamp technology that provides enhanced
thermal control for advanced applications -- including the
formation of gate stacks, nickel silicide, and ultra-shallow
junctions -- through the sub-2X nanometer regime. We are excited to
collaborate with CNT and its partners to develop leading-edge
anneal applications to help our customers fabricate their most
advanced device designs at current and future technology
nodes."
About Fraunhofer CNT The Fraunhofer Center
Nanoelectronic Technologies (CNT) in Dresden, Germany has been
established in 2005 by the Fraunhofer-Gesellschaft in a type of a
private public partnership with Infineon Technologies AG and
Advanced Micro Devices (AMD). Located within "Silicon Saxony," CNT
provides ideal collaboration opportunities for research institutes
and material/equipment manufacturers in the field of
nanoelectronics. The organization's main focus is the development
of advanced process steps for manufacturing in nanoelectronic
applications. CNT also works on functional materials and the
characterization of devices, the development of new analytic and
metrology methods and on the analysis of wafer processing results.
For more information, visit:
http://www.cnt.fraunhofer.de/en/About_us/
About Mattson Technology, Inc. Mattson
Technology, Inc. designs, manufactures and markets semiconductor
wafer processing equipment used in the fabrication of integrated
circuits. We are a leading supplier of plasma and rapid thermal
processing equipment to the global semiconductor industry, and
operate in three primary product sectors: Dry Strip, Rapid Thermal
Processing and Etch. Through manufacturing and design innovation,
we have produced technologically advanced systems that provide
productive and cost-effective solutions for customers fabricating
current- and next-generation semiconductor devices. For more
information, please contact Mattson Technology, Inc., 47131 Bayside
Parkway, Fremont, CA, 94538. Telephone: (800) MATTSON/(510)
657-5900. Internet: www.mattson.com.
"Safe Harbor" Statement Under the Private
Securities Litigation Reform Act of 1995: This news release
contains forward-looking statements. Forward-looking statements
address matters that are subject to a number of risks and
uncertainties that can cause actual results to differ materially.
Such risks and uncertainties include, but are not limited to:
end-user demand for semiconductors; customer demand for
semiconductor manufacturing equipment; the timing of significant
customer orders for the Company's products; customer acceptance of
delivered products and the Company's ability to collect amounts due
upon shipment and upon acceptance; the Company's ability to timely
manufacture, deliver and support ordered products; the Company's
ability to bring new products to market and to gain market share
with such products; customer rate of adoption of new technologies;
risks inherent in the development of complex technology; the timing
and competitiveness of new product releases by the Company's
competitors; the Company's ability to align its cost structure with
market conditions; and other risks and uncertainties described in
the Company's Forms 10 K, 10-Q and other filings with the
Securities and Exchange Commission. The Company assumes no
obligation to update the information provided in this news
release.
Mattson Technology Contact Lauren Vu Mattson
Technology, Inc. tel +1-510-492-6250 fax +1-510-492-5930
lauren.vu@mattson.com Investor Contact Laura Guerrant-Oiye
Guerrant Associates tel +1-808-882-1467
lguerrant@guerrantir.com
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