Advanced Energy Solid-State Matching Network Selected for Plasma Impedance Matching in <14 nm Semiconductor Etch Applications
May 17 2017 - 11:45AM
Company Reveals Design Win on
Major OEM Etch Tool with Navigator® II FastCap(TM) Solid-State
Matching Network
FORT COLLINS, Colo., May 17, 2017 (GLOBE NEWSWIRE)
-- Advanced Energy Industries, Inc. (Nasdaq:AEIS), a global leader
in precision power conversion, announced today that its solid-state
matching network has been selected by one of the world's largest
suppliers of semiconductor manufacturing equipment. The ultra-fast
Navigator® II FastCap(TM) solid-state matching network provides
greater capability, productivity and performance, enabling
increased predictability and reproducibility in sub-14 nm plasma
processes.
The latest addition to the Navigator II platform,
FastCap solid-state technology enables tuning speeds more than 100X
faster than conventional, mechanically operated, variable vacuum
capacitors. When combined with Navigator II digital instrumentation
and controls, the patented, hot-switchable capacitors follow the
fastest process transitions in real time-offering a distinct
advantage over standard vacuum capacitors and resulting in improved
run-to-run process repeatability.
Yuval Wasserman, president and CEO of Advanced
Energy, said, "Customer partnerships in evaluating new technologies
are core to our leadership in precision power. This design win
reflects our deep expertise in RF power and a collaborative effort
to understand and respond to unique process challenges and dynamic
plasma characteristics, in order to produce a stable and
significant tune-time advantage. The best-selling Navigator II
platform-the industry's first digital matching network-combined
with FastCap solid-state technology is the answer to the
manufacturing of thinner films and finer features in rapid,
complex, multi-step processes."
Advanced Energy leads in RF power conversion with
more than 400,000 units shipped worldwide. The FastCap solution is
qualified for use with AE's Paramount® line of RF power
supplies. Currently in volume
production, this product is available for many PECVD and etch bias
applications.
About Advanced
Energy
Advanced Energy (Nasdaq:AEIS) is a global leader
in innovative power and control technologies for high-growth,
precision power solutions for thin films processes and industrial
applications. Advanced Energy is headquartered in Fort Collins,
Colorado, with dedicated support and service locations around the
world. For more information, go
to www.advanced-energy.com.
CONTACT:
Christina Liebman
Director, Corporate Marketing
Advanced Energy Industries, Inc.
+1.970.407.6444
This
announcement is distributed by Nasdaq Corporate Solutions on behalf
of Nasdaq Corporate Solutions clients.
The issuer of this announcement warrants that they are solely
responsible for the content, accuracy and originality of the
information contained therein.
Source: Advanced Energy Industries, Inc. via
Globenewswire
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