MTSN Mattson Technology, Inc.

Mattson Technology, Inc. (NASDAQ: MTSN), a leading supplier of advanced process equipment used to manufacture semiconductors, today announced that a leading Asian foundry has selected the Helios XP rapid thermal processing (RTP) system for the manufacturing and development of advanced logic devices. Volume production and revenue are expected to begin in 2011.

"The selection of the Helios XP for this leading foundry's logic production fab demonstrates that our latest RTP tool is making progress in further penetrating the critical foundry and logic segments," said Andreas Toennis, Senior Vice President and General Manager of Mattson Technology's Thermal Products Group. "The Helios XP is ideally suited for a high-volume, foundry manufacturing environment because of its ability to execute the full range of RTP applications for logic manufacturing at advanced technology nodes, as well as its strength in meeting the stringent requirements of next-generation RTP processes."

Toennis continued, "The Helios XP's unique HotShield™ technology is a key differentiating feature that provides reduction of pattern loading effects to improve yields on our customers' production of logic devices and enables the successful implementation of advanced processes, including critical spike anneal and nickel silicide applications. We are confident that this leading foundry customer will continue to choose the Helios XP for its ability to provide significant advantages in productivity, advanced processing performance, and manufacturing flexibility to meet its most demanding manufacturing challenges."

About Mattson Technology, Inc.

Mattson Technology, Inc. designs, manufactures and markets semiconductor wafer processing equipment used in the fabrication of integrated circuits. We are a leading supplier of plasma and rapid thermal processing equipment to the global semiconductor industry, and operate in three primary product sectors: Dry Strip, Rapid Thermal Processing and Etch. Through manufacturing and design innovation, we have produced technologically advanced systems that provide productive and cost-effective solutions for customers fabricating current- and next-generation semiconductor devices. For more information, please contact Mattson Technology, Inc., 47131 Bayside Parkway, Fremont, CA, 94538. Telephone: (800) MATTSON/(510) 657-5900. Internet: www.mattson.com.

"Safe Harbor" Statement Under the Private Securities Litigation Reform Act of 1995: This news release contains forward-looking statements. Forward-looking statements address matters that are subject to a number of risks and uncertainties that can cause actual results to differ materially. Such risks and uncertainties include, but are not limited to: end-user demand for semiconductors; customer demand for semiconductor manufacturing equipment; the timing of significant customer orders for the Company's products; customer acceptance of delivered products and the Company's ability to collect amounts due upon shipment and upon acceptance; the Company's ability to timely manufacture, deliver and support ordered products; the Company's ability to bring new products to market and to gain market share with such products; customer rate of adoption of new technologies; risks inherent in the development of complex technology; the timing and competitiveness of new product releases by the Company's competitors; the Company's ability to align its cost structure with market conditions; and other risks and uncertainties described in the Company's Forms 10 K, 10-Q and other filings with the Securities and Exchange Commission. The Company assumes no obligation to update the information provided in this news release.

Mattson Technology Contact Lauren Vu Mattson Technology, Inc. tel +1-510-492-6250 fax +1-510-492-5930 lauren.vu@mattson.com Investor Contact Laura Guerrant-Oiye Guerrant Associates tel +1-808-882-1467 lguerrant@guerrantir.com