MTSN Mattson Technology, Inc.

Mattson Technology, Inc. (NASDAQ: MTSN), a leading supplier of advanced process equipment used to manufacture semiconductors, announced today that it has filed a universal shelf registration statement on Form S-3 with the Securities and Exchange Commission ("SEC"). The shelf registration statement is intended to provide the Company with financial flexibility to raise capital from the offering of up to $75 million of common stock, preferred stock, warrants, depository shares, units and/or debt securities, conducted in one or multiple offerings while the shelf registration statement is effective. Mattson Technology does not have any immediate plans to offer or sell its securities under the shelf registration statement.

A registration statement relating to these securities has been filed with the SEC but has not yet become effective. These securities may not be sold nor may offers to buy be accepted prior to the time that the registration statement becomes effective. Any offer of these securities will be made solely by means of the prospectus included in the registration statement and any prospectus supplement that may be issued with respect to such offering. Mattson intends to use the proceeds from any sale of securities under the Shelf Registration Statement for general corporate purposes. This press release shall not constitute a solicitation of an offer to buy, nor shall there be any sale of these securities in any state in which such offer, solicitation or sale would be unlawful prior to the registration or qualification under the securities laws of any such state.

A copy of the prospectus included in the registration statement may be obtained on the SEC's website at www.sec.gov. In addition, when available, copies of the prospectus, and any prospectus supplement relating to a particular offering, may be obtained by contacting Mattson Technology, Inc., attention: Andy Moring, 47131 Bayside Parkway, Fremont, CA, 94538, andy.moring@mattson.com.

About Mattson Technology, Inc. Mattson Technology, Inc. designs, manufactures and markets semiconductor wafer processing equipment used in the fabrication of integrated circuits. We are a leading supplier of plasma and rapid thermal processing equipment to the global semiconductor industry, and operate in three primary product sectors: Dry Strip, Rapid Thermal Processing and Etch. Through manufacturing and design innovation, we have produced technologically advanced systems that provide productive and cost-effective solutions for customers fabricating current- and next-generation semiconductor devices. For more information, please contact Mattson Technology, Inc., 47131 Bayside Parkway, Fremont, CA, 94538. Telephone: (800) MATTSON/(510) 657-5900. Internet: www.mattson.com.

"Safe Harbor" Statement Under the Private Securities Litigation Reform Act of 1995: This news release contains forward-looking statements. Forward-looking statements address matters that are subject to a number of risks and uncertainties that can cause actual results to differ materially. Such risks and uncertainties include, but are not limited to: the process related to shelf registration statement filed by Mattson; any offering and sale of securities by Mattson pursuant to the shelf registration statement; Mattson's expected use of proceeds from the sale of securities under the shelf registration statement; and other risks and uncertainties described in the Company's Forms 10-K, 10-Q and other filings with the Securities and Exchange Commission. The Company assumes no obligation to update the information provided in this news release.

Mattson Technology Contact Andy Moring tel +1-(510) 492-6241 fax +1-(510) 492-5963 andy.moring@mattson.com Investor & Media Contact Laura Guerrant-Oiye Guerrant Associates tel 808-882-1467 lguerrant@guerrantir.com