MTSN Mattson Technology, Inc.

Mattson Technology, Inc. (NASDAQ: MTSN), a leading supplier of advanced process equipment used to manufacture semiconductors, today announced that it has shipped the Alpine® etch system to a leading foundry customer in Asia. The company noted that the system shipped under an evaluation agreement and that it will be used for advanced wafer level packaging applications. The shipment marks the Alpine system's second major placement in the packaging arena, where the cost-of-ownership and ion control provide key differentiation against other etch tools available in the market.

Vice President and General Manager of Mattson Technology's Plasma Products Group, Rene George, noted, "We are extremely pleased with the evaluation selection and shipment of the Alpine etch system to this long standing customer of Mattson. Advancements in wafer level packaging continue to put demands on our customers that require enabling solutions while maintaining the lowest possible cost. The Alpine technology was chosen based on its unique ability to independently control ion energy and ion density while maintaining a very low energy level in the process chamber, resulting in enhanced process performance. Combined with our high-productivity platform, the Alpine truly offers differentiated etch capabilities at low cost-of-ownership in wafer level packaging applications. We look forward to working closely with the customer as their trusted solution provider and to fully meet their advanced packaging requirements."

About Mattson Technology, Inc. Mattson Technology, Inc. designs, manufactures and markets semiconductor wafer processing equipment used in the fabrication of integrated circuits. We are a leading supplier of plasma and rapid thermal processing equipment to the global semiconductor industry, and operate in three primary product sectors: Dry Strip, Rapid Thermal Processing and Etch. Through manufacturing and design innovation, we have produced technologically advanced systems that provide productive and cost-effective solutions for customers fabricating current- and next-generation semiconductor devices. For more information, please contact Mattson Technology, Inc., 47131 Bayside Parkway, Fremont, CA, 94538. Telephone: (800) MATTSON/(510) 657-5900. Internet: www.mattson.com.

"Safe Harbor" Statement Under the Private Securities Litigation Reform Act of 1995: This news release contains forward-looking statements. Forward-looking statements address matters that are subject to a number of risks and uncertainties that can cause actual results to differ materially. Such risks and uncertainties include, but are not limited to: end-user demand for semiconductors; customer demand for semiconductor manufacturing equipment; the timing of significant customer orders for the Company's products; customer acceptance of delivered products and the Company's ability to collect amounts due upon shipment and upon acceptance; the Company's ability to timely manufacture, deliver and support ordered products; the Company's ability to bring new products to market and to gain market share with such products; customer rate of adoption of new technologies; risks inherent in the development of complex technology; the timing and competitiveness of new product releases by the Company's competitors; the Company's ability to align its cost structure with market conditions; and other risks and uncertainties described in the Company's Forms 10-K, 10-Q and other filings with the Securities and Exchange Commission. The Company assumes no obligation to update the information provided in this news release.

Mattson Technology Contact Jay Chun Mattson Technology, Inc. tel (510) 492-6190 fax (510) 492-5914 Jay.Chun@mattson.com Investor & Media Contact Laura Guerrant-Oiye Guerrant Associates tel 808-882-1467 lguerrant@guerrantir.com