Mattson Technology, Inc. (NASDAQ: MTSN), a leading supplier of advanced process equipment used to manufacture semiconductors, today announced that a leading semiconductor memory customer based in Asia has placed follow-on orders for the paradigmE® etch system, Mattson Technology's latest etch innovation. The Company noted that the orders come from a long-standing customer, and the systems will be used for multiple dielectric etch applications.

"Several paradigmE etch tools are already in production at the customer's fab," said David L. Dutton, president and CEO, "and this order reaffirms their confidence in Mattson Technology and our ability to deliver the cost-effective and technically advanced etch solutions required for their leading-edge volume manufacturing." Dutton noted that the orders expand the application base for the paradigmE, with the customer utilizing Mattson's unique low ion energy processing capability that offers superior on-wafer performance.

Dutton added, "Mattson Technology is clearly making advancements in etch, and our strategic decision to expand into this growth segment that triples our served available market is paying off. We fully anticipate a significant portion of our revenue in 2010 will come from our advanced etch products. We have committed significant resources to etch and have maintained a singular focus on the successes of our customers by delivering unique and differentiated solutions. As our customers continue to demand advanced etch solutions at the lowest cost, our team is ready and committed to support their current manufacturing needs, as well as their anticipated demands for future requirements."

About Mattson Technology, Inc. Mattson Technology, Inc. designs, manufactures and markets semiconductor wafer processing equipment used in the fabrication of integrated circuits. We are a leading supplier of plasma and rapid thermal processing equipment to the global semiconductor industry, and operate in three primary product sectors: Dry Strip, Rapid Thermal Processing and Etch. Through manufacturing and design innovation, we have produced technologically advanced systems that provide productive and cost-effective solutions for customers fabricating current- and next-generation semiconductor devices. For more information, please contact Mattson Technology, Inc., 47131 Bayside Parkway, Fremont, CA, 94538. Telephone: (800) MATTSON/(510) 657-5900. Internet: www.mattson.com.

"Safe Harbor" Statement Under the Private Securities Litigation Reform Act of 1995: This news release contains forward-looking statements. Forward-looking statements address matters that are subject to a number of risks and uncertainties that can cause actual results to differ materially. Such risks and uncertainties include, but are not limited to: end-user demand for semiconductors; customer demand for semiconductor manufacturing equipment; the timing of significant customer orders for the Company's products; customer acceptance of delivered products and the Company's ability to collect amounts due upon shipment and upon acceptance; the Company's ability to timely manufacture, deliver and support ordered products; the Company's ability to bring new products to market and to gain market share with such products; customer rate of adoption of new technologies; risks inherent in the development of complex technology; the timing and competitiveness of new product releases by the Company's competitors; the Company's ability to align its cost structure with market conditions; and other risks and uncertainties described in the Company's Forms 10-K, 10-Q and other filings with the Securities and Exchange Commission. The Company assumes no obligation to update the information provided in this news release.

Mattson Technology Contact Jay Chun Mattson Technology, Inc. tel (510) 492-6190 fax (510) 492-5914 Jay.Chun@mattson.com Investor & Media Contact Laura Guerrant-Oiye Guerrant Associates tel (808) 882-1467 lguerrant@guerrantir.com

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