Mattson Technology Selected as Development Partner by Leading Global Semiconductor Manufacturer For Advanced Millisecond Anneal
April 21 2008 - 7:30AM
PR Newswire (US)
Millios(TM) Flash RTP System Enables Advanced 45 nm and Beyond
Processes FREMONT, Calif., April 21 /PRNewswire-FirstCall/ --
Mattson Technology, Inc. (NASDAQ:MTSN), a leading supplier of
advanced semiconductor process equipment used to manufacture
Integrated Circuits (or "ICs"), today announced that a leading
global semiconductor manufacturer has selected its Millios(TM)
flash Rapid Thermal Processing (fRTP) system for advanced
millisecond anneal processing based on its capabilities to address
challenging sub-45 nanometer applications. The fRTP annealing
system is scheduled to ship to the manufacturer's 300 mm advanced
development fab in May, where it will be used for process and
performance characterization of critical flash RTP applications.
Gartner Dataquest estimates that the total emerging millisecond RTP
anneals market is expected to grow at a 12 percent compound annual
growth rate (CAGR) from 2007 to 2012. "As the number of implant
steps increases with each device generation, chipmakers face a
myriad of complex technical challenges in which they must achieve
increasingly smaller geometries and fabricate more powerful chips,"
noted Andreas Toennis, senior vice president and general manager of
Mattson Technology's Thermal Products Group. "Mattson's proprietary
Millios system provides critical technical improvements in process
flexibility, control and high throughput, resulting in low cost of
ownership. With its superior technical innovations, including an
extremely powerful flash lamp which is essential for the fRTP
application, Millios enables high throughput and may eliminate the
need for separate spike anneal. Millios is the only tool that
delivers full manufacturing controls with the ability to combine
standard and millisecond anneals." Toennis added, "The Millios
system has already demonstrated the advanced capabilities to
address advanced 45 nm and beyond processes and is well positioned
to drive Mattson's growth. We look forward to working with this
latest Millios customer, and are committed to supporting their
expanded production capabilities in the future as well as their
growth strategy to meet their customers' anticipated demand for
leading-edge semiconductors, telecommunications, and digital
convergence technology." About Millios(TM) In the nanotechnology
era, where chips have features 1000 times smaller than the diameter
of a human hair, advanced RTP applications will require annealing
that is fractions of, to a few thousandths of, a second in
duration. Mattson's Millios(TM) Flash-Assist RTP (fRTP) is a
next-generation millisecond annealing tool featuring advanced
process control and high throughput to meet manufacturing and
development needs. The technique offers effective process times of
1-3 milliseconds. The system features a patented arc lamp
technology that processes the wafers through millisecond "flashes"
(similar to a camera flash), providing improved thermal control for
ultra-shallow junction (USJ) anneal and other advanced applications
through the 22 nm regime. Millios also combines fully automated
wafer handling hardware and software from Mattson's
production-proven Helios(TM) RTP system. Millios was qualified in
2007 by semiconductor and leading nanoelectronics research centers
in Europe and the United States. About Mattson Technology, Inc.
Mattson Technology, Inc. is a leading supplier of dry strip
equipment and the second largest supplier of rapid thermal
processing equipment in the global semiconductor industry. The
company's strip and RTP equipment utilize innovative technology to
deliver advanced processing performance and productivity gains to
semiconductor manufacturers worldwide for the fabrication of
current- and next-generation devices. For more information, please
contact Mattson Technology, Inc., 47131 Bayside Parkway, Fremont,
Calif. 94538. Telephone: (800) MATTSON/(510) 657-5900. Fax: (510)
492-5911. Internet: http://www.mattson.com/. "Safe Harbor"
Statement Under the Private Securities Litigation Reform Act of
1995: This news release contains forward-looking statements
regarding the Company's future prospects. Forward-looking
statements address matters that are subject to a number of risks
and uncertainties that can cause actual results to differ
materially. Such risks and uncertainties include, but are not
limited to: end-user demand for semiconductors; customer demand for
semiconductor manufacturing equipment; the timing of significant
customer orders for the Company's products; customer acceptance of
delivered products and the Company's ability to collect amounts due
upon shipment and upon acceptance; the Company's ability to timely
manufacture, deliver and support ordered products; the Company's
ability to bring new products to market and to gain market share
with such products; customer rate of adoption of new technologies;
risks inherent in the development of complex technology; the timing
and competitiveness of new product releases by the Company's
competitors; the Company's ability to align its cost structure with
market conditions; and other risks and uncertainties described in
the Company's Forms 10-K, 10-Q and other filings with the
Securities and Exchange Commission. The Company assumes no
obligation to update the information provided in this news release.
Mattson Technology Contact Investor & Media Contact Kerem
Kapkin Laura Guerrant tel +1-(510) 492-2765 Guerrant Associates fax
+1-(510) 474-1449 tel 808-882-1467 fax 808-882-1417 DATASOURCE:
Mattson Technology, Inc. CONTACT: Kerem Kapkin of Mattson
Technology, +1-510-492-2765, fax, +1-510-474-1449, ; or Investor
& Media, Laura Guerrant of Guerrant Associates,
+1-808-882-1467, fax, +1-808-882-1417, , for Mattson Technology,
Inc. Web site: http://www.mattson.com/
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