MTSN Mattson Technology, Inc.

Expansion into Etch Market Doubles Mattson's Served-Available-Market and Broadens Future Growth Opportunities FREMONT, Calif., March 25 /PRNewswire-FirstCall/ -- Mattson Technology, Inc. (NASDAQ:MTSN), a leading supplier of advanced semiconductor process equipment used to manufacture Integrated Circuits (or "IC's"), today announced that the Company has received an order for its Nexion(TM) systems. The order for two Nexion systems from a major 300-mm memory manufacturing facility in Asia marks Mattson's expansion into the growing Etch market and broadens the Company's future growth opportunities. This brings Mattson's overall engagement with this customer to a total of three existing fabs. The Nexion system, introduced by Mattson in 2006, addresses the stringent technology requirements and Cost-Of-Ownership (COO) needs of the Etch market. Gartner Dataquest predicts that the total available market for plasma-based dielectric etching in 2008 would exceed $2.5 Billion. "This order is of particular significance to Mattson," noted Randy Matsuda, senior vice president and general manager of Mattson Technology's Etch Division, "as it is a clear validation that Mattson's advanced technology and leading COO delivers solid value to our customers. By expanding into the Etch arena, we effectively double Mattson's served-available-market and strengthen the Company to capitalize on future growth opportunities." Matsuda added, "The anisotropic etching application space not only occupies the vast majority of the total available plasma etch market, but also is expected to extend well beyond current customer manufacturing nodes. With the introduction of Nexion, Mattson has been able to offer our customers improved process performance and very low COO in this fast growing yet cost sensitive market." Matsuda concluded, "We are committed to supporting our customer's expanded production capabilities in the future and their growth strategy to meet their customers' anticipated demand for leading-edge semiconductors, telecommunications, and digital convergence technology." About Nexion(TM) Mattson's Nexion(TM) system was introduced in 2006, and addresses the stringent technology requirements and Cost-Of-Ownership (COO) needs of the Etch market. The Nexion system utilizes Mattson's patented Faraday-Shielded inductively coupled plasma (ICP) source technology, along with bias capability for anisotropic etching of 300-mm wafers. Nexion leverages the very high throughput of Mattson's wafer transfer platform and the Company's differentiated source technology to provide superior process on-wafer performance at very low COO. About Mattson Technology, Inc. Mattson Technology, Inc. is a leading supplier of dry strip equipment and the second largest supplier of rapid thermal processing equipment in the global semiconductor industry. The company's strip and RTP equipment utilize innovative technology to deliver advanced processing performance and productivity gains to semiconductor manufacturers worldwide for the fabrication of current- and next-generation devices. For more information, please contact Mattson Technology, Inc., 47131 Bayside Parkway, Fremont, Calif. 94538. Telephone: (800) MATTSON/(510) 657-5900. Fax: (510) 492-5911. Internet: http://www.mattson.com/. "Safe Harbor" Statement Under the Private Securities Litigation Reform Act of 1995: This news release contains forward-looking statements regarding the Company's future prospects. Forward-looking statements address matters that are subject to a number of risks and uncertainties that can cause actual results to differ materially. Such risks and uncertainties include, but are not limited to: end-user demand for semiconductors; customer demand for semiconductor manufacturing equipment; the timing of significant customer orders for the Company's products; customer acceptance of delivered products and the Company's ability to collect amounts due upon shipment and upon acceptance; the Company's ability to timely manufacture, deliver and support ordered products; the Company's ability to bring new products to market and to gain market share with such products; customer rate of adoption of new technologies; risks inherent in the development of complex technology; the timing and competitiveness of new product releases by the Company's competitors; the Company's ability to align its cost structure with market conditions; and other risks and uncertainties described in the Company's Forms 10-K, 10-Q and other filings with the Securities and Exchange Commission. The Company assumes no obligation to update the information provided in this news release. Mattson Technology Contact Investor & Media Contact Kerem Kapkin Laura Guerrant tel +1-(510) 492-2765 Guerrant Associates fax +1-(510) 474-1449 tel 808-882-1467 fax 808-882-1417 DATASOURCE: Mattson Technology, Inc. CONTACT: Kerem Kapkin of Mattson Technology, +1-510-492-2765, fax, +1-510-474-1449, ; or Investor & Media, Laura Guerrant of Guerrant Associates, +1-808-882-1467, fax, +1-808-882-1417, , for Mattson Technology Web site: http://www.mattson.com/

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