New Product Line Extension Features
Enabling Technology for Image Sensor Market
BEVERLY,
Mass., Oct. 10, 2022 /PRNewswire/ -- Axcelis
Technologies, Inc. (NASDAQ: ACLS), a leading supplier of
innovative, high-productivity solutions for the semiconductor
industry, announced today the successful qualification of a Purion
XEmax™ high energy ion implant system for production at a leading
CMOS image sensor manufacturer.
President and CEO Mary Puma
commented, "We're pleased to have enhanced this customer's next
generation image sensor technology development and manufacturing
capabilities. We are excited that growth in the image sensor
market, combined with Purion XEmax systems at multiple customer
sites, will further expand this tool's footprint and fuel Purion
Platform growth."
The Purion XEmax:
The new Purion XEmax high energy implanter was designed for
emerging, high performance image sensor applications. The enhanced
beamline features multiple filtration systems to eliminate
energetic metal contaminants which can otherwise result in
compromised dark current and white pixel count levels. The system
is built on the industry leading Purion XE high energy implant
platform and features Axcelis' patented Boost Technology™, which
delivers beam energies up to 15 MeV. With innovative technology,
the Purion XEmax is delivering the tightest angle and overall
process control to enable higher quality photodiode performance for
next generation devices.
About Axcelis:
Axcelis (NASDAQ: ACLS), headquartered in Beverly, Mass., has been providing innovative,
high-productivity solutions for the semiconductor industry for over
40 years. Axcelis is dedicated to developing enabling process
applications through the design, manufacture and complete life
cycle support of ion implantation systems, one of the most critical
and enabling steps in the IC manufacturing process. Learn more
about Axcelis at www.axcelis.com.
CONTACTS:
Maureen Hart
(editorial/media) 978.787.4266
Doug Lawson (investor relations)
978.787.9552
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SOURCE Axcelis Technologies, Inc.