BEVERLY, Mass., Feb. 2, 2021 /PRNewswire/ -- Axcelis
Technologies, Inc. (Nasdaq: ACLS), a leading supplier of
innovative, high-productivity solutions for the semiconductor
industry, announced today the second shipment of the Purion H200™
high current implanter. The Purion H200 system went to a leading
power device manufacturer, targeted for use in a production ramp
for Si power devices. The system shipped in the fourth
quarter.
Executive Vice President of Product Development, Bill Bintz, commented, "We're excited to provide
the Purion H200 to a second leading customer in the power device
market as expanding our presence in this market segment is a key
objective of our growth strategy." Bintz continued, "The growing
footprint of the Purion H200 among power device manufacturers is a
testament to the uniquely innovative capabilities of this tool to
address the specific implant needs of these customers. The Purion
H200 can be deemed the most versatile high current ion implanter in
the fab as it delivers superior precision, productivity and the
widest dose and energy range, enabling device manufacturers to
develop novel material modification applications previously
considered impractical with implant."
The Purion H200
The Purion H200 is the first and only single wafer high current
implanter designed to cover all high dose implant applications from
energies as low as 5keV to a maximum of 200keV, and is especially
suited to foundry and power device manufacturers' needs. Built upon
the industry-proven Purion H high current beamline with its unique
scanned spot beam architecture, the Purion H200 delivers the
productivity of high current tools with the precision and accuracy
of medium current implanters.
About Axcelis:
Axcelis (Nasdaq: ACLS), headquartered in Beverly, Mass., has been providing innovative,
high-productivity solutions for the semiconductor industry for over
40 years. Axcelis is dedicated to developing enabling process
applications through the design, manufacture and complete life
cycle support of ion implantation systems, one of the most critical
and enabling steps in the IC manufacturing process. Learn more
about Axcelis at www.axcelis.com.
CONTACTS:
Maureen Hart (editorial/media)
978.787.4266
Doug Lawson (investor relations)
978.787.9552
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SOURCE Axcelis Technologies, Inc.