Advanced Energy’s 4100T Optical Fiber Thermometer Improves Temperature Accuracy and Control in Advanced Semiconductor Processes
November 23 2021 - 8:00AM
Business Wire
With better measurement accuracy and higher read rate, the
4100T multi-channel, non-contact optical fiber thermometer enables
easy upgrade from market-leading OR4000T
Advanced Energy (Nasdaq: AEIS) – a global leader in highly
engineered, precision power conversion, measurement and control
solutions – today introduced the Sekidenko 4100T pyrometer. A
drop-in replacement for Advanced Energy’s market-leading OR4000T,
the 4100T optical fiber thermometer (OFT) delivers exceptional
temperature measurement accuracy, a wider temperature range and
simultaneous multi-channel maximum read speed for leading-edge
semiconductor and adjacent thin-film applications.
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With better measurement accuracy and
higher read rate, the 4100T multi-channel, non-contact optical
fiber thermometer enables easy upgrade from market-leading OR4000T.
(Photo: Business Wire)
“Advanced Energy’s pyrometers are used by top semiconductor OEMs
due to our industry-leading performance. The 4100T further extends
our leadership with many enhancements beyond our industry-leading
OR4000T, enabling our customers to reach unmatched levels of
process control and manufacturability,” said Jeff Hebb, vice
president of marketing and applications, critical sensing and
control at Advanced Energy. “The feature-rich 4100T is a ‘drop-in’
replacement for OR4000T, making upgrades very convenient for our
existing customers. In addition, it supports EtherCAT, serial and
USB communications.”
Up to four different temperatures can be measured simultaneously
using the 4100T, which reduces the number of control boxes required
for multi-point control, shrinks the form factor and delivers
cost-saving benefits. The high read rate of up to 1 kHz per channel
enables faster thermal response for better temperature control and
uniformity of leading-edge applications such as rapid thermal
processing, laser annealing, atomic layer deposition and other
advanced deposition technologies.
The multi-channel OFT with application-specific, configurable
wavelength provides exceptional accuracy, repeatability,
reliability and fast read rates for the most demanding temperature
measurements. Traditional thermocouple and other contact sensor
measurements are undesirable for applications where physical
contact with the wafer can cause damage, contamination or
measurement errors due to heat transfer effects. The 4100T measures
temperature directly with ±1.5°C accuracy in situ without making
contact with the object of interest. In addition to eliminating
these potential contact measurement issues, the 4100T is also an
optimal solution for applications where the wafer is in motion or
is being processed at very high temperatures or high ramp
rates.
For detailed product information and technical specifications,
visit
https://www.advancedenergy.com/products/temperature-measurement/thermal-measurement-optical-pyrometers-power-controllers/semiconductorthin-film-pyrometers/sekidenko-4100t/.
About Advanced Energy Advanced Energy (Nasdaq: AEIS) is a
global leader in the design and manufacturing of highly engineered,
precision power conversion, measurement and control solutions for
mission-critical applications and processes. AE’s power solutions
enable customer innovation in complex applications for a wide range
of industries including semiconductor equipment, industrial,
manufacturing, telecommunications, data center computing and
healthcare. With engineering know-how and responsive service and
support around the globe, the company builds collaborative
partnerships to meet technology advances, propel growth for its
customers and innovate the future of power. Advanced Energy has
devoted four decades to perfecting power for its global customers
and is headquartered in Denver, Colorado, USA.
For more information, visit www.advancedenergy.com.
Advanced Energy | Precision. Power. Performance.
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For press inquiries:
Simon Flatt Grand Bridges for Advanced Energy Industries,
Inc. aei@grandbridges.com +1 310.529.0321
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