Advanced Energy Announces High-Accuracy, Multi-Channel Sensing Platform with Ultra-Wide Temperature Range
July 06 2023 - 8:00AM
Business Wire
Five-channel Luxtron® FluorOptic® Thermometry (FOT) platform
with industry-leading accuracy for extremely low and high
temperature sensing
Advanced Energy Industries, Inc. (Nasdaq: AEIS) – a global
leader in highly engineered, precision power conversion,
measurement and control solutions – has extended its Luxtron®
FluorOptic® Thermometry (FOT) family with a highly integrated
converter platform that provides high-accuracy sensing from
extremely low to extremely high temperatures.
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Advanced Energy Announces High-Accuracy,
Multi-Channel Sensing Platform with Ultra-Wide Temperature Range
(Photo: Business Wire)
Ideal for plasma-enhanced semiconductor deposition and etch
fabrication processes, the new Luxtron M-1100 operates from -200°C,
the start of the cryogenic range, to ‘hot chuck’ temperatures of
450°C with industry-leading accuracy of +/- 0.1°C and stability of
+/- 0.05 °C. The integration of five channels supports the
monitoring of multiple probes from a single converter, while
flexible communication outputs simplify digital monitoring, updates
and system integration.
“Accurate monitoring across extended temperature ranges is
critical as semiconductor manufacturers look to meet the complex
etch and deposition requirements of next-generation fabrication
processes,” said Dhaval Dhayatkar, vice president and general
manager of critical sensing and control products at Advanced
Energy. “The Luxtron M-1100 further extends our leadership in
high-accuracy, phosphor-based fiber-optic thermometry and meets
customer demands to minimize measurement overheads and provide
integration into monitoring and control systems.”
Leveraging fiber optic probes with phosphor sensor technology,
Luxtron FOT sensing systems combine high-performance converters
with an advanced light source, a photodetector proprietary software
algorithm and low-noise amplification circuitry. The Luxtron M-1100
is the first model to offer both analog and EtherCAT communication
interfaces.
The new converter simplifies implementation by enabling
wall-mounting on the side of the system being monitored. User
experience is further enhanced with support from Advanced Energy’s
global engineering teams, which collaborate with OEMs to develop
custom probes for leading edge applications.
For detailed product information and technical specifications,
visit our website.
The Luxtron M-1100 will be on display at AE’s booth 960 at
SEMICON West 2023, which takes place July 11-13 at the Moscone
Center in San Francisco, CA. Learn more here.
About Advanced Energy
Advanced Energy Industries, Inc. (Nasdaq: AEIS) is a global
leader in the design and manufacture of highly engineered,
precision power conversion, measurement and control solutions for
mission-critical applications and processes. Advanced Energy’s
power solutions enable customer innovation in complex applications
for a wide range of industries including semiconductor equipment,
industrial production, medical and life sciences, data center
computing, networking and telecommunications. With engineering
know-how and responsive service and support for customers around
the globe, the company builds collaborative partnerships to meet
technology advances, propels growth of its customers and innovates
the future of power. Advanced Energy has devoted four decades to
perfecting power. It is headquartered in Denver, Colorado, USA.
For more information, visit www.advancedenergy.com.
Advanced Energy | Precision. Power. Performance. Trust.
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version on businesswire.com: https://www.businesswire.com/news/home/20230706051081/en/
Simon Flatt Grand Bridges for Advanced Energy Industries, Inc.
aei@grandbridges.com +1 415 800 4529
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