Advanced Energy Expands High Accuracy Temperature Monitoring Portfolio with New Luxtron® FluorOptic® Sensing Platform
July 11 2022 - 2:00PM
Business Wire
New sensing platform with RubiLux™ and VioLux™ phosphor
formulations enable precise, repeatable measurement across an
extended temperature range
Advanced Energy Industries, Inc. (Nasdaq: AEIS) – a global
leader in highly engineered, precision power conversion,
measurement and control solutions – has expanded its Luxtron®
family of FluorOptic® Thermometry (FOT) solutions with a new
converter platform and two proprietary phosphor formulations. The
Luxtron M-1000 converter with RubiluxTM and VioLuxTM phosphor
formulations enable high accuracy temperature measurement over an
expanded temperature range for the most advanced semiconductor etch
and deposition processes.
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Advanced Energy Expands High Accuracy
Temperature Monitoring Portfolio with New Luxtron® FluorOptic®
Sensing Platform (Photo: Business Wire)
Featuring a new light source and improved low noise
photodetection, the Luxtron M-1000 provides dual channel capability
with accuracy variations as low as ± 0.2°C, stability above 0.05°C
and the industry’s broadest operating range from -200 to 450°C. The
converter is optimized to work with both phosphor formulations to
accommodate the full temperature range.
“Wafer temperature is a critical process parameter for advanced
High Aspect Ratio (HAR) etching used to create semiconductor
devices such as 3D NAND,” said Jeff Hebb, vice president of
strategic marketing and applications, critical sensing and control
at Advanced Energy. “To optimize HAR etch processes, semiconductor
manufacturers at the leading edge are increasingly moving towards a
wider range of operating temperatures ranging from cryogenic to hot
chuck. By delivering precise, repeatable measurement across a wide
temperature range, the M-1000 converter and new phosphor
formulations enable the full range of temperature measurement
required for high-volume manufacturing of HAR processes.”
For decades, Advanced Energy’s Luxtron FOT sensing technology
has been leading the industry with high temperature accuracy and
wide operating range. The Luxtron FOT sensing system combines a
phosphor-coated fiber optic probe with a high-performance converter
that integrates an advanced light source, a photodetector
proprietary software algorithm and low-noise amplification
circuitry. Because measurement is based on optical sensing, Luxtron
FOT systems offer more accuracy than conventional electrical
sensors in processes involving strong electromagnetic fields,
including plasma etch and deposition, MRI systems and power
transformers.
For detailed product information and technical specifications,
visit our website.
The Luxtron M-1000 will be showcased at AE’s booth 844 at
SEMICON West 2022, which takes place July 12–14 at the Moscone
Center in San Francisco, CA. Learn more:
www.advancedenergy.com/semiconwest.
About Advanced Energy
Advanced Energy Industries, Inc. (Nasdaq: AEIS) is a global
leader in the design and manufacture of highly engineered,
precision power conversion, measurement and control solutions for
mission-critical applications and processes. Advanced Energy’s
power solutions enable customer innovation in complex applications
for a wide range of industries including semiconductor equipment,
industrial, manufacturing, telecommunications, data center
computing and healthcare. With engineering know-how and responsive
service and support for customers around the globe, the company
builds collaborative partnerships to meet technology advances,
propels growth of its customers and innovates the future of power.
Advanced Energy has devoted four decades to perfecting power. It is
headquartered in Denver, Colorado, USA.
For more information, visit www.advancedenergy.com.
Advanced Energy | Precision. Power. Performance.
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