Advanced Energy Highlights Precision Power and Control Technologies for Semiconductor and Thin-Film Processing Applications a...
January 27 2016 - 12:59AM
Advanced Energy Industries, Inc. (NasdaqGM:AEIS) today will
highlight its advanced power and control technologies at SEMICON®
Korea 2016. Among its process power, high voltage power and thermal
products on display, the company will feature its new, floating,
high voltage bipolar power supply and next-generation high-speed
pyrometer. The UltraVolt FLHV series provides high voltage power
for the strong force of electrostatic chucks (ESC) and elevates
system performance with advanced controls and monitoring as well as
floating (isolated) unipolar/bipolar high voltage outputs with high
stability and reliability. The Sekidenko MXE G2 pyrometer
provides high-speed temperature and reflectance measurement for
advanced deposition processes, including advanced MOCVD
applications for HBLED production and emerging III-V materials.
“Our new high voltage and thermal products are great examples of
how AE continues to innovate in every area of our business,
expanding our portfolio to suit the evolving needs of our
customers,” said Yuval Wasserman, Advanced Energy president and
CEO. “AE has long established the standard for precision power in
the semiconductor industry and is now setting the standard for ESC
control, accuracy and monitoring with the FLHV series. We offer
exceptional temperature and reflectance measurement with the MXE G2
product for processes requiring high-speed acquisition, such as
high susceptor rotation speeds commonly used for HBLED
production.”
On display, Advanced Energy will showcase its full product
portfolio for semiconductor and thin-film processing applications,
including:
- RF power with advanced multi-level pulsing, enabling a wide
variety of semiconductor applications and providing flexibility and
adaptability for 3D, IC, VNAND and next-generation device
structures
- Source technology uniquely suited to operate in ultra-clean
semiconductor applications, enabling critical plasma-based
processes with lower device damage, higher throughput and higher
yields
- High voltage modules and systems for e-beam, e-chuck and other
semiconductor, analytical and industrial processes that require
energy density, flexibility and modularity
- DC power for PVD processes utilized in semiconductor and
display manufacturing for copper, aluminum, tantalum, titanium and
newer exotic materials
- Thermal products, including pyrometers, optical fiber
thermometers and SCR thyristor power controllers, that offer
precise thermal profiles and advanced process control solutions for
increased productivity, yield and throughput
SEMICON Korea takes place at the COEX Exhibition Center in
Seoul, January 27 - 29. To learn more about Advanced Energy’s
featured products, please visit the company in Hall A, booth 2712,
and the company’s event website at
http://www.advanced-energy.com/en/sck2016.html.
About Advanced Energy
Advanced Energy (Nasdaq:AEIS) is a global leader in innovative
power and control technologies for high-growth, precision power
solutions for thin films processes and industrial applications.
Advanced Energy is headquartered in Fort Collins, Colorado, with
dedicated support and service locations around the world.
CONTACT:
Bates Marshall
Senior Vice President
Global Sales and Marketing
Advanced Energy Industries, Inc.
+1.408.574.2534
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