LEHIGH VALLEY, Pa.,
July 27 /PRNewswire-FirstCall/ -- Air
Products (NYSE: APD) today announced the addition of xenon
difluoride (XeF2) to its portfolio of electronic materials. XeF2 is
used as an etching gas, primarily in the Micro Electro Mechanical
Systems (MEMS) market. XeF2 provides manufacturers with a high
selectivity to silicon versus SiO2 and other materials.
Air Products is uniquely positioned to serve the burgeoning XeF2
market thanks to its more than 35-year history of fluorine
expertise and its access to affordable xenon on account of its
large-scale air separation units and XeCovery™ xenon recovery
system.
"Our XeCovery and XeF2 offerings are complementary and together
offer customers a stable low-cost supply of XeF2," said
Tim Maykut, commercial development
manager for Air Products. "Our experience in chemical synthesis has
shown that the continuous, flow-through process we developed can
deliver quality material at the high volumes needed to match the
growth potential of the MEMS market. Additionally, our deep
understanding of etching process applications and supply of other
etch materials provides further value to any XeF2 user. Also, our
packaging and delivery expertise support an easy integration of
this material to customers' equipment. "
Air Products has already built a pilot plant capable producing
up to 300 kilograms per year, and this production technology can
quickly be scaled to metric ton capacities.
To hear more about the xenon difluoride market and its use in
the MEMS industry and elsewhere, please go to
www.airproducts.com/videos/popup/audio_2010-05-27-XeFe_Podcast2.html.
For more information on this new product, please visit
www.airproducts.com/xef2.
Air Products (NYSE: APD) serves customers in industrial, energy,
technology and healthcare markets worldwide with a unique portfolio
of atmospheric gases, process and specialty gases, performance
materials, and equipment and services. Founded in 1940,
Air Products has built leading positions in key growth markets
such as semiconductor materials, refinery hydrogen, home healthcare
services, natural gas liquefaction, and advanced coatings and
adhesives. The company is recognized for its innovative culture,
operational excellence and commitment to safety and the
environment. In fiscal 2009, Air Products had revenues of
$8.3 billion, operations in over 40
countries, and 18,900 employees around the globe. For more
information, visit www.airproducts.com.
***NOTE: This release may contain forward-looking statements.
Actual results could vary materially, due to changes in current
expectations.
SOURCE Air Products