BEVERLY, Mass., Feb. 24, 2022 /PRNewswire/ -- Axcelis
Technologies, Inc. (Nasdaq: ACLS), a leading supplier of enabling
ion implantation solutions for the semiconductor industry, today
announced multiple shipments in the first quarter of the Company's
Purion H200™ high current, Purion EXE™ high energy and the Purion
M™ medium current Power Series™ implanters to leading Si and
SiC power device chipmakers. The shipments went to multiple fabs
located in Europe and Asia. The systems will be used in high volume
production of Si and SiC power devices.
Axcelis' Leadership in the Power Device Segment Continues to
Expand
Executive Vice President of Product Development, Bill Bintz, commented, "Device fabrication in
the power device market segment is very implant intensive. The
Purion Power Series product portfolio is uniquely positioned to
cover all current and emerging implant applications for this market
segment. We look forward to continuing to support our customers'
goals to improve power device performance and expand manufacturing
capacity."
About Axcelis:
Axcelis (Nasdaq: ACLS), headquartered
in Beverly, Mass., has been
providing innovative, high-productivity solutions for the
semiconductor industry for 40 years. Axcelis is dedicated to
developing enabling process applications through the design,
manufacture and complete life cycle support of ion implantation
systems, one of the most critical and enabling steps in the IC
manufacturing process. Learn more about Axcelis at
www.axcelis.com.
CONTACTS:
Maureen Hart (editorial/media)
978.787.4266
Doug Lawson (investor relations)
978.787.9552
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SOURCE Axcelis Technologies, Inc.