Air Products Launches New ACT(R) NE-168 for Etch Residue Removal
July 11 2006 - 2:00PM
PR Newswire (US)
NE-Series is Tunable to Ever-Changing Needs of Semiconductor
Manufacturers LEHIGH VALLEY, Pa., July 11 /PRNewswire-FirstCall/ --
Air Products (NYSE:APD) today introduced ACT(R) NE-168, a new etch
and ash residue remover engineered to meet the challenging
requirements of semiconductor surface cleaning. The ACT product
lines offer solutions in surface preparation technology, a
necessary step in the semiconductor manufacturing process flow. The
ACT NE-168 formulation is a buffered, fluoride-containing stripper
product that demonstrates cleaning efficacy in single-wafer-tool
processing as well as in batch processing. ACT NE-168 is suitable
for both logic and memory applications and is aimed at the 65nm and
45nm technology nodes. "The improved stripper product from our ACT
NE series has risen to the technology challenge of copper and
advanced low-k dielectrics. We have demonstrated that our stripper
technology is tunable to meet customers' stringent requirements,"
said Arifin Budihardjo, ACT product manager -- new product
development, Air Products. "The versatile platform of the NE series
can be built upon to enhance the formulation's cleaning efficacy as
the technology moves to the next generation." ACT NE-168 is
effective at low process temperatures, ranging from room
temperature to 40 degrees Celsius, which helps provide an extended
bath life. Air Products (NYSE:APD) serves customers in technology,
energy, healthcare and industrial markets worldwide with a unique
portfolio of products, services and solutions, providing
atmospheric gases, process and specialty gases, performance
materials and chemical intermediates. Founded in 1940, Air Products
has built leading positions in key growth markets such as
semiconductor materials, refinery hydrogen, home healthcare
services, natural gas liquefaction, and advanced coatings and
adhesives. The company is recognized for its innovative culture,
operational excellence and commitment to safety and the environment
and is listed in the Dow Jones Sustainability and FTSE4Good
Indices. The company has annual revenues of $8.1 billion,
operations in over 30 countries, and over 20,000 employees around
the globe. For more information, visit http://www.airproducts.com/.
***NOTE: This release may contain forward-looking statements.
Actual results could vary materially, due to changes in current
expectations. DATASOURCE: Air Products CONTACT: Media Inquiries:
Robert Brown, +1-610-481-1192, ; Investor Inquiries: Phil Sproger,
+1-610-481-7461, , both of Air Products Web site:
http://www.airproducts.com/
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