BEVERLY, Mass., Feb. 22, 2021 /PRNewswire/ -- Axcelis
Technologies, Inc. (Nasdaq: ACLS), a leading supplier of
innovative, high-productivity solutions for the semiconductor
industry, announced today that it has shipped the second Purion
XEmax™ high energy evaluation system to a leading foundry in the
Asia Pacific region. The Purion
XEmax will be used for CMOS image sensor manufacturing. The system
shipped in the first quarter.
Bill Bintz, Executive Vice
President, Product Development explained, "We are excited by recent
evaluation shipments of new Purion product extensions that will
increase our footprint and drive Axcelis toward our $650M target business model. Strong growth in the
image sensor market continues to drive robust demand for high
energy implant. The new Purion XEmax, combined with the popular
Purion XE family of products, will extend Axcelis' market and
technology leadership in this high growth market."
The Purion XEmax
The new Purion XEmax high energy
implanter was designed for emerging, high performance image
sensor applications. The enhanced beamline features multiple
filtration systems to eliminate energetic metal contaminants which
can otherwise result in compromised dark current and white pixel
count levels. The new system is built on the industry
leading Purion XE high energy implant platform and features
Axcelis' new patented Boost Technology™, which delivers beam
energies up to 15 MeV. With innovative new technology, the Purion
XEmax is delivering the most precise angle and overall process
control to enable higher quality photodiode performance for next
generation CIS devices.
About Axcelis:
Axcelis (Nasdaq: ACLS), headquartered
in Beverly, Mass., has been
providing innovative, high-productivity solutions for the
semiconductor industry for over 40 years. Axcelis is dedicated to
developing enabling process applications through the design,
manufacture and complete life cycle support of ion implantation
systems, one of the most critical and enabling steps in the IC
manufacturing process. Learn more about Axcelis at
www.axcelis.com.
CONTACTS:
Maureen Hart
(editorial/media) 978.787.4266
Doug Lawson (investor relations)
978.787.9552
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SOURCE Axcelis Technologies, Inc.