Nova Introduces the New NovaScan 3090
March 23 2005 - 10:24AM
PR Newswire (US)
Nova Introduces the New NovaScan 3090 Nova Measuring Instruments
Introduces the NovaScan 3090CD on Lam Research Corporation 2300
Exelan(R) Etch System and the NovaScan 3090SA Standalone System
REHOVOTH, Israel, March 23 /PRNewswire-FirstCall/ -- Nova Measuring
Instruments Ltd. (NASDAQ:NVMI), the market leader in integrated
measurement and process control for the semiconductor industry,
today launched a new series of metrology systems, the NovaScan 3090
series, starting with the introduction of the NovaScan 3090CD that
is installed on Lam Research Corporation's (NASDAQ:LRCX) 2300
Exelan Etch System. The system forms an advanced metrology platform
for Critical Dimension (CD) control and profile measurements, and
is designed so that it can operate both as an integrated metrology
and stand alone platform for 200mm and 300mm systems, for 65nm IC
manufacturing and beyond. The NovaScan 3090CD is based on Nova's
earlier field proven technology platform, the NovaScan 3060CD
system. NovaScan 3090CD is integrated in the exact same
configuration as the NovaScan 3060CD system, thus offering
customers an easy upgrade path. Equipped with a single polarized
channel, from Deep-UV to Near-IR, the NovaScan 3090CD supports the
measurement of 2D structures and enables 3D shape characterization.
The system provides real-time measurement of CD, trench depth,
photoresist height, thickness and shape of complex layer stacks.
The reliable single channel system provides the highest throughput
of an integrated system in the market, while maintaining the
cleanliness and hermetic structure needed to operate in different
process conditions. The system demonstrates a 2X performance
improvement in metrology capabilities over the NovaScan 3060CD,
with enhanced throughput capabilities, while integration and
physical layout remain unchanged. Bents Kidron, Nova's Director of
Marketing states: "The NovaScan 3090CD is the best Integrated
Metrology solution for today's emerging industry requirements,
providing optical CD measurements and supporting the emerging
trends of 3-Dimensional and 'in-the-array' measurements." About
Nova: Nova Measuring Instruments Ltd. develops, designs and
produces integrated process control systems in the semiconductor
manufacturing industry. Nova provides a broad range of integrated
process control solutions that link different semiconductor
processes and process equipment. The Company's website is
http://www.nova.co.il/ Company Contact: Investor relations
Contacts: Chai Toren, CFO Ehud Helft / Kenny Green Nova Measuring
Instruments Ltd. Gelbart Kahana Tel: +972-8-938-7505 Tel:
+1-866-704-6710 E-mail: E-mail : http://www.nova.co.il/ DATASOURCE:
Nova Measuring Instruments, Ltd CONTACT: Company Contact: Chai
Toren, CFO, Nova Measuring Instruments Ltd., Tel: +972-8-938-7505,
E-mail: , http://www.nova.co.il/; Investor relations Contacts: Ehud
Helft / Kenny Green, Gelbart Kahana, Tel: +1-866-704-6710, E-mail :
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