MTSN Mattson Technology, Inc.

Mattson Technology, Inc. (NASDAQ: MTSN), a leading supplier of advanced process equipment used to manufacture semiconductors, today announced the release of the paradigmE® etch system, the company's latest innovation targeted to meet the stringent requirements of advanced dielectric etch applications. The latest etch system extends Mattson's Nexion® etch with state-of-the-art technology features that offer superior on-wafer performance, including excellent control of within-wafer uniformity, profile and critical-dimension. In addition, the paradigmE's compact and high-productivity platform has demonstrated greater than 50% throughput improvement over the competitors, providing enabling technology at low Cost-of-Ownership (CoO).

The Company noted that it has received multiple paradigmE orders from a leading memory customer, who has been evaluating the paradigmE system since 2008. The Company also anticipates the shipment of a paradigmE evaluation system to its fourth etch customer in the current first quarter.

David L. Dutton, president and CEO, noted, "We are extremely pleased to announce the release of the paradigmE. The industry has been demanding a cost effective and technically advanced dielectric etch solution required for leading-edge volume manufacturing. Our unique Faraday-shielded ICP source technology combined with the field-proven, high-productivity platform delivers a clear advantage to our customers seeking advanced etch technology at the lowest cost."

Dutton added, "Expanding into the etch market was a strategic decision for Mattson Technology. Following the footsteps of the Nexion etch success, the paradigmE further solidifies our position to address the growing dielectric etch market segment. The paradigmE etch system covers all dielectric etch applications qualified by Nexion and more, while the overall process and tool performances have met or exceeded all expectations. The latest paradigmE orders from our key customer are testament to the traction we are gaining with etch, and we are fully committed to work closely with our customer to continue to support their current as well as anticipated demand for future requirements."

About Mattson Technology, Inc.

Mattson Technology, Inc. designs, manufactures and markets semiconductor wafer processing equipment used in the fabrication of integrated circuits. We are a leading supplier of plasma and rapid thermal processing equipment to the global semiconductor industry. Through manufacturing and design innovation, we have produced technologically advanced systems that provide productive and cost effective solutions for customers fabricating current- and next-generation semiconductor devices. For more information, please contact Mattson Technology, Inc., 47131 Bayside Parkway, Fremont, CA, 94538. Telephone: (800) MATTSON/(510) 657-5900. Internet: www.mattson.com

"Safe Harbor" Statement Under the Private Securities Litigation Reform Act of 1995: This news release contains forward-looking statements. Forward-looking statements address matters that are subject to a number of risks and uncertainties that can cause actual results to differ materially. Such risks and uncertainties include, but are not limited to: end-user demand for semiconductors; customer demand for semiconductor manufacturing equipment; the timing of significant customer orders for the Company's products; customer acceptance of delivered products and the Company's ability to collect amounts due upon shipment and upon acceptance; the Company's ability to timely manufacture, deliver and support ordered products; the Company's ability to bring new products to market and to gain market share with such products; customer rate of adoption of new technologies; risks inherent in the development of complex technology; the timing and competitiveness of new product releases by the Company's competitors; the Company's ability to align its cost structure with market conditions; and other risks and uncertainties described in the Company's Forms 10-K, 10-Q and other filings with the Securities and Exchange Commission. The Company assumes no obligation to update the information provided in this news release.

Mattson Technology Contact Jay Chun Mattson Technology, Inc. tel (510) 492-6190 fax (510) 492-5930 Jay.Chun@mattson.com Investor & Media Contact Laura Guerrant-Oiye Guerrant Associates tel (808) 882-1467 lguerrant@guerrantir.com