BEVERLY,
Mass., May 23, 2023 /PRNewswire/ -- Axcelis
Technologies, Inc. (Nasdaq: ACLS), a leading supplier of enabling
ion implantation solutions for the semiconductor industry, today
announced shipment of multiple Purion H200 SiC Power Series™ ion
implanter systems to leading power device chipmakers in
Europe and Asia. Shipments include both evaluation and
revenue systems and will be used in high volume production of power
devices supporting automotive industry electric vehicle (EV)
applications.
President and CEO Dr. Russell Low
commented, "The power device market continues to grow rapidly and
is a key driver of our growth globally. We are pleased to continue
to support our customers' fab capacity expansion with our market
leading Purion Power Series ion implanters."
Executive Vice President of Marketing and Applications Dr.
Greg Redinbo stated, "Device
fabrication in this segment requires high implant capital intensity
for processes that require higher energy implants and higher dose
implants. The Purion H200 SiC provides chipmakers with these
capabilities, allowing them to optimize their fab productivity and
power device performance."
About Axcelis:
Axcelis (Nasdaq: ACLS), headquartered
in Beverly, Mass., has been
providing innovative, high-productivity solutions for the
semiconductor industry for over 40 years. Axcelis is dedicated to
developing enabling process applications through the design,
manufacture and complete life cycle support of ion implantation
systems, one of the most critical and enabling steps in the IC
manufacturing process. Learn more about Axcelis at
www.axcelis.com.
CONTACTS:
Maureen Hart (editorial/media)
978.787.4266
Doug Lawson (investor relations)
978.787.9552
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SOURCE Axcelis Technologies, Inc.